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Fabrication of Fresnel zone plates by ion-beam lithography and application as objective lenses in extreme ultraviolet microscopy at 13 nm wavelength |
Optics Letters, Vol. 37, Issue 24, pp. 5100-5102 (2012)
http://dx.doi.org/10.1364/OL.37.005100
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Abstract
Fresnel zone plates are used for imaging at extreme ultraviolet and soft x-ray wavelengths. Fabricating these zone plates is challenging due to small structure sizes (
© 2012 Optical Society of America
OCIS Codes
(340.7480) X-ray optics : X-rays, soft x-rays, extreme ultraviolet (EUV)
(050.1965) Diffraction and gratings : Diffractive lenses
ToC Category:
X-ray Optics
History
Original Manuscript: August 6, 2012
Revised Manuscript: November 5, 2012
Manuscript Accepted: November 9, 2012
Published: December 7, 2012
Virtual Issues
Vol. 8, Iss. 1 Virtual Journal for Biomedical Optics
Citation
Johannes Overbuschmann, Julia Hengster, Stephan Irsen, and Thomas Wilhein, "Fabrication of Fresnel zone plates by ion-beam lithography and application as objective lenses in extreme ultraviolet microscopy at 13 nm wavelength," Opt. Lett. 37, 5100-5102 (2012)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-37-24-5100
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