OSA's Digital Library

Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Editor: Alan E. Willner
  • Vol. 37, Iss. 24 — Dec. 15, 2012
  • pp: 5229–5231

Improved grating reconstruction by determination of line roughness in extreme ultraviolet scatterometry

Mark-Alexander Henn, Sebastian Heidenreich, Hermann Gross, Andreas Rathsfeld, Frank Scholze, and Markus Bär  »View Author Affiliations


Optics Letters, Vol. 37, Issue 24, pp. 5229-5231 (2012)
http://dx.doi.org/10.1364/OL.37.005229


View Full Text Article

Enhanced HTML    Acrobat PDF (255 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

The accurate determination of critical dimensions and roughness is necessary to ensure the quality of photoresist masks that are crucial for the operational reliability of electronic components. Scatterometry provides a fast indirect optical nondestructive method for the determination of profile parameters that are obtained from scattered light intensities using inverse methods. We illustrate the effect of line roughness on the reconstruction of grating parameters employing a maximum likelihood scheme. Neglecting line roughness introduces a strong bias in the parameter estimations. Therefore, such roughness has to be included in the mathematical model of the measurement in order to obtain accurate reconstruction results. In addition, the method allows to determine line roughness from scatterometry. The approach is demonstrated for simulated scattering intensities as well as for experimental data of extreme ultraviolet light scatterometry measurements. The results obtained from the experimental data are in agreement with independent atomic force microscopy measurements.

© 2012 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(120.3940) Instrumentation, measurement, and metrology : Metrology

ToC Category:
Diffraction and Gratings

History
Original Manuscript: October 29, 2012
Manuscript Accepted: November 16, 2012
Published: December 13, 2012

Citation
Mark-Alexander Henn, Sebastian Heidenreich, Hermann Gross, Andreas Rathsfeld, Frank Scholze, and Markus Bär, "Improved grating reconstruction by determination of line roughness in extreme ultraviolet scatterometry," Opt. Lett. 37, 5229-5231 (2012)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-37-24-5229


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. H. Huang and F. Terry, Thin Solid Films 455, 828 (2004). [CrossRef]
  2. C. Raymond, M. Murane, S. Prins, S. Sohail, H. Navi, J. Mc Neil, and J. Horsch, J. Vac. Sci. Technol. B 15, 361 (1997). [CrossRef]
  3. J. Perlich, F. Kamm, J. Rau, F. Scholze, and G. Ulm, J. Vac. Sci. Technol. B 22, 3059 (2004). [CrossRef]
  4. F. Scholze and C. Laubis, Proc. SPIE 6792, 67920U (2008). [CrossRef]
  5. T. A. Germer, J. Opt. Soc. Am. A 24, 696 (2007). [CrossRef]
  6. T. Schuster, S. Rafler, V. F. Paz, F. Frenner, and W. Osten, Microelectron. Eng. 86, 1029 (2009). [CrossRef]
  7. W.-Y. Chen and C.-H. Lin, Thin Solid Films 522, 79 (2012). [CrossRef]
  8. A. Kato and F. Scholze, Appl. Opt. 49, 6102 (2010). [CrossRef]
  9. H. Gross, M.-A. Henn, S. Heidenreich, A. Rathsfeld, and M. Bär, Appl. Opt. 51, 7384 (2012). [CrossRef]
  10. R. Millar, Maximum Likelihood Estimation and Inference(Wiley, 2011).
  11. M.-A. Henn, H. Gross, F. Scholze, M. Wurm, C. Elster, and M. Bär, Opt. Express 20, 12771 (2012). [CrossRef]
  12. J. Elschner, R. Hinder, A. Rathsfeld, and G. Schmidt, http://www.wias-berlin.de/software /DIPOG .
  13. J. Pomplun, S. Burger, F. Schmidt, F. Scholze, C. Laubis, and U. Dersch, Proc. SPIE 7028, 70280P (2008). [CrossRef]
  14. B. D. Bunday, M. Bishop, and D. McCormack, Proc. SPIE 5375, 515 (2004). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

Figures

Fig. 1. Fig. 2. Fig. 3.
 

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited