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Single-shot profilometry of rough surfaces using hyperspectral interferometry |
Optics Letters, Vol. 37, Issue 3, pp. 350-352 (2012)
http://dx.doi.org/10.1364/OL.37.000350
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Abstract
The combination of white light interferometry with hyperspectral imaging (“hyperspectral interferometry”) is a recently proposed technique for single-shot measurement of 3D surface profiles. We consider for the first time its application to speckled wavefronts from optically rough surfaces. The intensity versus wavenumber signal at each pixel provides unambiguous range information despite the speckle-induced random phase shifts. Experimental results with samples undergoing controlled rigid body translation demonstrate a measurement repeatability of 460 nm for a bandwidth of approximately 30 nm. Potential applications include roughness measurement and coordinate measurement machine probes where rapid data acquisition in noncooperative environments is essential.
© 2012 Optical Society of America
OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness
ToC Category:
Instrumentation, Measurement, and Metrology
History
Original Manuscript: October 25, 2011
Manuscript Accepted: November 14, 2011
Published: January 20, 2012
Citation
Taufiq Widjanarko, Jonathan M. Huntley, and Pablo D. Ruiz, "Single-shot profilometry of rough surfaces using hyperspectral interferometry," Opt. Lett. 37, 350-352 (2012)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-37-3-350
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