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Optics Letters

Optics Letters


  • Editor: Alan E. Willner
  • Vol. 37, Iss. 4 — Feb. 15, 2012
  • pp: 479–481

Characterization of a photonic strain sensor in silicon-on-insulator technology

Wouter J. Westerveld, Jose Pozo, Peter J. Harmsma, Ruud Schmits, Erik Tabak, Teun C. van den Dool, Suzanne M. Leinders, Koen W.A. van Dongen, H. Paul Urbach, and Mirvais Yousefi  »View Author Affiliations

Optics Letters, Vol. 37, Issue 4, pp. 479-481 (2012)

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Recently there has been growing interest in sensing by means of optical microring resonators in photonic integrated circuits that are fabricated in silicon-on-insulator (SOI) technology. Taillaert et al. [Proc. SPIE 6619, 661914 (2007)] proposed the use of a silicon-waveguide-based ring resonator as a strain gauge. However, the strong lateral confinement of the light in SOI waveguides and its corresponding modal dispersion where not taken into account. We present a theoretical understanding, as well as experimental results, of strain applied on waveguide-based microresonators, and find that the following effects play important roles: elongation of the racetrack length, modal dispersion of the waveguide, and the strain-induced change in effective refractive index.

© 2012 Optical Society of America

OCIS Codes
(000.2190) General : Experimental physics
(160.1050) Materials : Acousto-optical materials
(160.6000) Materials : Semiconductor materials
(280.4788) Remote sensing and sensors : Optical sensing and sensors
(130.7408) Integrated optics : Wavelength filtering devices
(120.4880) Instrumentation, measurement, and metrology : Optomechanics

ToC Category:

Original Manuscript: November 21, 2011
Revised Manuscript: December 19, 2011
Manuscript Accepted: December 19, 2011
Published: February 6, 2012

Wouter J. Westerveld, Jose Pozo, Peter J. Harmsma, Ruud Schmits, Erik Tabak, Teun C. van den Dool, Suzanne M. Leinders, Koen W.A. van Dongen, H. Paul Urbach, and Mirvais Yousefi, "Characterization of a photonic strain sensor in silicon-on-insulator technology," Opt. Lett. 37, 479-481 (2012)

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