Integrated TiO<sub>2</sub> resonators for visible photonics

Jennifer T. Choy; Jonathan D. B. Bradley; Parag B. Deotare; Ian B. Burgess; Christopher C. Evans; Eric Mazur; Marko Lončar

doi:10.1364/OL.37.000539

Optics Letters
Vol. 37,
Issue 4,
pp. 539-541
(2012)
•https://doi.org/10.1364/OL.37.000539

Integrated ${TiO}_{2}$ resonators for visible photonics

Jennifer T. Choy, Jonathan D. B. Bradley, Parag B. Deotare, Ian B. Burgess, Christopher C. Evans, Eric Mazur, and Marko Lončar

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Jennifer T. Choy, Jonathan D. B. Bradley, Parag B. Deotare, Ian B. Burgess, Christopher C. Evans, Eric Mazur, and Marko Lončar, "Integrated TiO₂ resonators for visible photonics," Opt. Lett. 37, 539-541 (2012)

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Abstract

We demonstrate waveguide-coupled titanium dioxide ( ${TiO}_{2}$ ) racetrack resonators with loaded quality factors of $2.2 \times 10^{4}$ for the visible wavelengths. The structures were fabricated in sputtered ${TiO}_{2}$ thin films on oxidized silicon substrates using standard top-down nanofabrication techniques, and passively probed in transmission measurements using a tunable red laser.

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Optics Letters