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Optics Letters

Optics Letters


  • Editor: Alan E. Willner
  • Vol. 37, Iss. 4 — Feb. 15, 2012
  • pp: 566–568

Near-surface modification of optical properties of fused silica by low-temperature hydrogenous atmospheric pressure plasma

Christoph Gerhard, Daniel Tasche, Stephan Brückner, Stephan Wieneke, and Wolfgang Viöl  »View Author Affiliations

Optics Letters, Vol. 37, Issue 4, pp. 566-568 (2012)

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In this Letter, we report on the near-surface modification of fused silica by applying a hydrogenous atmospheric pressure plasma jet at ambient temperature. A significant decrease in UV-transmission due to this plasma treatment was observed. By the use of secondary ion mass spectroscopy, the composition of the plasma-modified glass surface was investigated. It was found that the plasma treatment led to a reduction of a 100 nm thick SiO2 layer to SiOx of gradual depth-dependent composition. For this plasma-induced layer, depth-resolved characteristic optical parameters, such as index of refraction and dispersion, were determined. Further, a significant plasma-induced increase of the concentration of hydrogen in the bulk material was measured. The decrease in transmission is explained by the plasma-induced near-surface formation of SiOx on the one hand and the diffusion of hydrogen into the bulk material on the other hand.

© 2012 Optical Society of America

OCIS Codes
(160.2750) Materials : Glass and other amorphous materials
(240.6700) Optics at surfaces : Surfaces

ToC Category:

Original Manuscript: December 1, 2011
Manuscript Accepted: December 17, 2011
Published: February 8, 2012

Christoph Gerhard, Daniel Tasche, Stephan Brückner, Stephan Wieneke, and Wolfgang Viöl, "Near-surface modification of optical properties of fused silica by low-temperature hydrogenous atmospheric pressure plasma," Opt. Lett. 37, 566-568 (2012)

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  1. K. Zimmer, R. Böhme, and B. Rauschenbach, Appl. Phys. A 79, 1883 (2004). [CrossRef]
  2. R. Böhme, K. Zimmer, and B. Rauschenbach, Appl. Phys. A 82, 325 (2006). [CrossRef]
  3. M. Schulz-Ruhtenberg, J. Ihlemann, and J. Heber, Appl. Surf. Sci. 248, 190 (2005). [CrossRef]
  4. S. T. Tso and J. A. Pask, J. Am. Ceram. Soc. 65, 457 (1982). [CrossRef]
  5. A. L. Shabalov and M. S. Feldman, Thin Solid Films 110, 215 (1983). [CrossRef]
  6. M. Nakamura, Y. Mochizuki, K. Usami, Y. Itoh, and T. Nozaki, Solid State Commun. 50, 1079 (1984). [CrossRef]
  7. L. Schumann, A. Lehmann, H. Sobotta, V. Riede, U. Teschner, and K. Hübner, Phys. Status Solidi B 110, K69(1982). [CrossRef]
  8. I. T. Johansen, J. Appl. Phys. 37, 499 (1966). [CrossRef]
  9. H. R. Philipp, J. Phys. Chem. Solids 32, 1935 (1971). [CrossRef]
  10. K. Hübner, Phys. Status Solidi A 61, 665 (1980). [CrossRef]
  11. S. Förster, C. Mohr, and W. Viöl, Surf. Coat. Technol. 200, 827 (2005). [CrossRef]
  12. T. C. Manley, ECS Trans. 84, 83 (1943).
  13. A. Helmke, D. Hoffmeister, N. Mertens, S. Emmert, J. Schuette, and W. Viöl, New J. Phys. 11, 115025 (2009) [CrossRef]
  14. A. Benninghoven, Surf. Sci. 35, 427 (1973). [CrossRef]
  15. A. Benninghoven, Surf. Sci. 299-300, 246 (1994). [CrossRef]
  16. E. D. Palik, Handbook of Optical Constants of Solids(Academic, 1985).
  17. Data sheet Spectrosil2000 (Heraeus Quarzglas GmbH & Co. KG, 2010).
  18. T. W. Hickmott, J. Appl. Phys. 31, 128 (1960). [CrossRef]
  19. Y. Boliang, D. H. Ryan, J. M. D. Coey, Z. Altounian, J.O. Ström-Olsen, and F. Razavi, J. Phys. F 13, L217 (1983). [CrossRef]
  20. I. I. Kitaigorodskii, D. I. Mendeleev, E. A. Fainberg, and L. A. Grechanik, Glass Ceram. 19, 645 (1962). [CrossRef]
  21. I. M. Levin, V. S. Khotimchenko, and G. M. Sochivkin, Glass Ceram. 42, 359 (1985). [CrossRef]

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