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Optics Letters

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  • Editor: Alan E. Willner
  • Vol. 37, Iss. 4 — Feb. 15, 2012
  • pp: 566–568

Near-surface modification of optical properties of fused silica by low-temperature hydrogenous atmospheric pressure plasma

Christoph Gerhard, Daniel Tasche, Stephan Brückner, Stephan Wieneke, and Wolfgang Viöl  »View Author Affiliations


Optics Letters, Vol. 37, Issue 4, pp. 566-568 (2012)
http://dx.doi.org/10.1364/OL.37.000566


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Abstract

In this Letter, we report on the near-surface modification of fused silica by applying a hydrogenous atmospheric pressure plasma jet at ambient temperature. A significant decrease in UV-transmission due to this plasma treatment was observed. By the use of secondary ion mass spectroscopy, the composition of the plasma-modified glass surface was investigated. It was found that the plasma treatment led to a reduction of a 100 nm thick SiO2 layer to SiOx of gradual depth-dependent composition. For this plasma-induced layer, depth-resolved characteristic optical parameters, such as index of refraction and dispersion, were determined. Further, a significant plasma-induced increase of the concentration of hydrogen in the bulk material was measured. The decrease in transmission is explained by the plasma-induced near-surface formation of SiOx on the one hand and the diffusion of hydrogen into the bulk material on the other hand.

© 2012 Optical Society of America

OCIS Codes
(160.2750) Materials : Glass and other amorphous materials
(240.6700) Optics at surfaces : Surfaces

ToC Category:
Materials

History
Original Manuscript: December 1, 2011
Manuscript Accepted: December 17, 2011
Published: February 8, 2012

Citation
Christoph Gerhard, Daniel Tasche, Stephan Brückner, Stephan Wieneke, and Wolfgang Viöl, "Near-surface modification of optical properties of fused silica by low-temperature hydrogenous atmospheric pressure plasma," Opt. Lett. 37, 566-568 (2012)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-37-4-566


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