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SOI-based trapezoidal waveguide with 45° microreflector for noncoplanar optical interconnect |
Optics Letters, Vol. 37, Issue 5, pp. 782-784 (2012)
http://dx.doi.org/10.1364/OL.37.000782
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Abstract
A silicon on insulator (SOI)-based trapezoidal waveguide with a 45° reflector for noncoplanar optical interconnect is demonstrated. The proposed waveguide is fabricated on an orientation-defined (100) SOI substrate by using a single-step anisotropic wet-etching process. The optical performances of proposed waveguides are numerically and experimentally studied. Transmittance of
© 2012 Optical Society of America
OCIS Codes
(200.4650) Optics in computing : Optical interconnects
(230.4000) Optical devices : Microstructure fabrication
(230.7380) Optical devices : Waveguides, channeled
ToC Category:
Optical Devices
History
Original Manuscript: October 31, 2011
Revised Manuscript: January 9, 2012
Manuscript Accepted: January 12, 2012
Published: February 17, 2012
Citation
Chia-Chi Chang, Po-Kuan Shen, Chin-Ta Chen, Hsu-Liang Hsiao, Hsiao-Chin Lan, Yun-Chih Lee, and Mount-Learn Wu, "SOI-based trapezoidal waveguide with 45° microreflector for noncoplanar optical interconnect," Opt. Lett. 37, 782-784 (2012)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-37-5-782
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