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Optics Letters

Optics Letters


  • Editor: Alan E. Willner
  • Vol. 37, Iss. 5 — Mar. 1, 2012
  • pp: 848–850

Rapid in-process measurement of surface roughness using adaptive optics

Yiin Kuen Fuh, Kuo Chan Hsu, and Jia Ren Fan  »View Author Affiliations

Optics Letters, Vol. 37, Issue 5, pp. 848-850 (2012)

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We present an in-process measurement of surface roughness by combining an optical probe of laser-scattering phenomena and adaptive optics for aberration correction. Measurement results of five steel samples with a roughness ranging from 0.2 to 3.125 μm demonstrate excellent correlation between the peak power and average roughness with a correlation coefficient (R2) of 0.9967. The proposed adaptive-optics-assisted system is in good agreement with the stylus method, and error values of less than 8.7% are obtained for average sample roughness in the range of 0.265 to 1.119 μm. The proposed system can be used as a rapid in-process roughness monitor/estimator to further increase the precision and stability of manufacturing processes in situ.

© 2012 Optical Society of America

OCIS Codes
(010.1080) Atmospheric and oceanic optics : Active or adaptive optics
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness
(240.5770) Optics at surfaces : Roughness

ToC Category:
Atmospheric and Oceanic Optics

Original Manuscript: November 28, 2011
Revised Manuscript: December 25, 2011
Manuscript Accepted: January 16, 2012
Published: February 23, 2012

Yiin Kuen Fuh, Kuo Chan Hsu, and Jia Ren Fan, "Rapid in-process measurement of surface roughness using adaptive optics," Opt. Lett. 37, 848-850 (2012)

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