|
Stamp printing of silicon-nanomembrane-based photonic devices onto flexible substrates with a suspended configuration |
Optics Letters, Vol. 37, Issue 6, pp. 1020-1022 (2012)
http://dx.doi.org/10.1364/OL.37.001020
Enhanced HTML 
Acrobat PDF (397 KB)
Abstract
In this Letter, we demonstrate for the first time (to our best knowledge) stamp printing of silicon nanomembrane (SiNM)-based in-plane photonic devices onto a flexible substrate using a modified transfer printing method that utilizes a suspended configuration, which can adjust the adhesion between the released SiNM and the “handle” silicon wafer. With this method, 230 nm thick, 30 μm wide, and up to 5.7 cm long SiNM-based waveguides are transferred to flexible Kapton films with
© 2012 Optical Society of America
OCIS Codes
(130.1750) Integrated optics : Components
(220.4000) Optical design and fabrication : Microstructure fabrication
(220.4241) Optical design and fabrication : Nanostructure fabrication
(130.5296) Integrated optics : Photonic crystal waveguides
ToC Category:
Optical Design and Fabrication
History
Original Manuscript: September 28, 2011
Revised Manuscript: January 2, 2012
Manuscript Accepted: January 5, 2012
Published: March 8, 2012
Citation
Xiaochuan Xu, Harish Subbaraman, Amir Hosseini, Che-Yun Lin, David Kwong, and Ray T. Chen, "Stamp printing of silicon-nanomembrane-based photonic devices onto flexible substrates with a suspended configuration," Opt. Lett. 37, 1020-1022 (2012)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-37-6-1020
You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
Related Journal Articles 
- Miniature Planar Solid Immersion Mirror with Focused Spot Less Than a Quarter Wavelength (OE)
- Micro lens fabrication by means of femtosecond two photon photopolymerization (OE)
- Micro- and nanostructures inside sapphire by fs-laser irradiation and selective etching (OE)
- Broadband single-mode operation of standard optical fibers by using a sub-wavelength optical wire filter (OE)
- Nanomembrane transfer process for intricate photonic device applications (OL)
Related Conference Papers
- Integrated and Optical Device Applications and Novel Processing for Polymers
- Nanofabrication of Sub-Wavelength Grating Using Ultra-Fine Nano-Machining Process
- Nanofabrication of Sub-Wavelength Grating Using Ultra-Fine Nano-Machining Process
- Optical Performance Monitoring via Slow Light Enhanced Third Harmonic Generation in Silicon Photonic Crystal Waveguides
- Optical Performance Monitoring via Slow Light Enhanced Third Harmonic Generation in Silicon Photonic Crystal Waveguides
- Nanopore Fabrication in Hollow Integrated Waveguides
« Previous Article | Next Article »
OSA is a member of 