We report on the formation of one- and two-dimensional (1D and 2D) nanohole arrays on the surface of a silicon wafer by scanning with a femtosecond laser with appropriate power and speed. The underlying physical mechanism is revealed by numerical simulation based on the finite-difference time-domain technique. It is found that the length and depth of the initially formed gratings (or ripples) plays a crucial role in the generation of 1D or 2D nanohole arrays. The silicon surface decorated with such nanohole arrays can exhibit vivid structural colors through efficiently diffracting white light.
© 2012 Optical Society of America
Optical Data Storage
Original Manuscript: October 24, 2011
Revised Manuscript: December 16, 2011
Manuscript Accepted: January 18, 2012
Published: March 14, 2012
Cheng-Yun Zhang, Jian-Wu Yao, Hai-Ying Liu, Qiao-Feng Dai, Li-Jun Wu, Sheng Lan, Vyacheslav A. Trofimov, and Tatiana M. Lysak, "Colorizing silicon surface with regular nanohole arrays induced by femtosecond laser pulses," Opt. Lett. 37, 1106-1108 (2012)