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Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Editor: Alan E. Willner
  • Vol. 37, Iss. 7 — Apr. 1, 2012
  • pp: 1169–1171

Infrared antireflective filtering for extreme ultraviolet multilayer Bragg reflectors

V. V. Medvedev, A. E. Yakshin, R. W. E. van de Kruijs, V. M. Krivtsun, A. M. Yakunin, K. N. Koshelev, and F. Bijkerk  »View Author Affiliations


Optics Letters, Vol. 37, Issue 7, pp. 1169-1171 (2012)
http://dx.doi.org/10.1364/OL.37.001169


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Abstract

An extreme ultraviolet multilayer mirror with an integrated spectral filter for the IR range is presented and experimentally evaluated. The system consists of an IR-transparent B4C/Si multilayer stack which is used both as EUV-reflective coating and as a phase shift layer of the resonant IR antireflective (AR) coating. The AR coating is optimized in our particular case to suppress CO2 laser radiation at a wavelength of 10.6 μm, and a suppression of more than two orders of magnitude is demonstrated. The method allows high suppression over a large angular acceptance range, relevant for application in lithography systems.

© 2012 Optical Society of America

OCIS Codes
(230.1480) Optical devices : Bragg reflectors
(310.1210) Thin films : Antireflection coatings
(340.7480) X-ray optics : X-rays, soft x-rays, extreme ultraviolet (EUV)
(310.4165) Thin films : Multilayer design
(230.7408) Optical devices : Wavelength filtering devices

ToC Category:
X-ray Optics

History
Original Manuscript: December 26, 2011
Revised Manuscript: February 3, 2012
Manuscript Accepted: February 7, 2012
Published: March 23, 2012

Citation
V. V. Medvedev, A. E. Yakshin, R. W. E. van de Kruijs, V. M. Krivtsun, A. M. Yakunin, K. N. Koshelev, and F. Bijkerk, "Infrared antireflective filtering for extreme ultraviolet multilayer Bragg reflectors," Opt. Lett. 37, 1169-1171 (2012)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-37-7-1169


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