An effective optical readout approach based on a narrow-strip filter is presented to detect bends of a bimaterial microcantilever focal plane array, by which light intensity of the image plane (CCD image sensor plane) can be increased and its uniformity on the image plane effectively enhanced. It reduces the noise equivalent temperature difference of the microcantilever focal plane array IR imaging system and improves uniformity of the IR images. A comparative experiment is designed to verify effectiveness. The experimental results show that the proposed method has advantages of preferable effect.
© 2012 Optical Society of America
Fourier Optics and Signal Processing
Original Manuscript: December 12, 2011
Manuscript Accepted: January 22, 2012
Published: March 26, 2012
Cheng Gong, Mei Hui, Liquan Dong, Yuejin Zhao, Xiaomei Yu, and Xiaohua Liu, "Optical readout method based on a narrow-strip filter for microcantilever array sensing," Opt. Lett. 37, 1187-1189 (2012)