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Simultaneous determination of optical constants, thickness, and surface roughness of thin film from spectrophotometric measurements |
Optics Letters, Vol. 38, Issue 1, pp. 40-42 (2013)
http://dx.doi.org/10.1364/OL.38.000040
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Abstract
A model taking into consideration the refractive index inhomogeneity and surface roughness of a film was proposed for the simultaneous determination of the optical constants, thickness, and surface roughness of a single-layer thin film from spectrophotometric measurements. In the model, the rough surface was treated as an effective absorbing layer. The model was applied to determine simultaneously the parameters of single-layer
© 2012 Optical Society of America
OCIS Codes
(310.6860) Thin films : Thin films, optical properties
(310.6870) Thin films : Thin films, other properties
ToC Category:
Thin Films
History
Original Manuscript: October 10, 2012
Revised Manuscript: December 3, 2012
Manuscript Accepted: December 3, 2012
Published: December 20, 2012
Citation
Chun Guo, Mingdong Kong, Weidong Gao, and Bincheng Li, "Simultaneous determination of optical constants, thickness, and surface roughness of thin film from spectrophotometric measurements," Opt. Lett. 38, 40-42 (2013)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-38-1-40
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