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Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Editor: Alan E. Willner
  • Vol. 38, Iss. 1 — Jan. 1, 2013
  • pp: 40–42

Simultaneous determination of optical constants, thickness, and surface roughness of thin film from spectrophotometric measurements

Chun Guo, Mingdong Kong, Weidong Gao, and Bincheng Li  »View Author Affiliations


Optics Letters, Vol. 38, Issue 1, pp. 40-42 (2013)
http://dx.doi.org/10.1364/OL.38.000040


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Abstract

A model taking into consideration the refractive index inhomogeneity and surface roughness of a film was proposed for the simultaneous determination of the optical constants, thickness, and surface roughness of a single-layer thin film from spectrophotometric measurements. In the model, the rough surface was treated as an effective absorbing layer. The model was applied to determine simultaneously the parameters of single-layer MgF2 thin films deposited on fused silica substrates by the oblique-angle deposition technique. The film thicknesses and rms surface roughnesses extracted from spectrophotometric measurements with the proposed model were in good agreement with the values measured by a spectroscopic ellipsometer and an atomic force microscope, respectively.

© 2012 Optical Society of America

OCIS Codes
(310.6860) Thin films : Thin films, optical properties
(310.6870) Thin films : Thin films, other properties

ToC Category:
Thin Films

History
Original Manuscript: October 10, 2012
Revised Manuscript: December 3, 2012
Manuscript Accepted: December 3, 2012
Published: December 20, 2012

Citation
Chun Guo, Mingdong Kong, Weidong Gao, and Bincheng Li, "Simultaneous determination of optical constants, thickness, and surface roughness of thin film from spectrophotometric measurements," Opt. Lett. 38, 40-42 (2013)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-38-1-40


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