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Optics Letters

Optics Letters


  • Editor: Alan E. Willner
  • Vol. 38, Iss. 11 — Jun. 1, 2013
  • pp: 1939–1941

Tunable MEMS axicon mirror arrays

Jens Brunne and Ulrike Wallrabe  »View Author Affiliations

Optics Letters, Vol. 38, Issue 11, pp. 1939-1941 (2013)

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Highly aspheric reflective micro-optics for the generation of quasi-nondiffracting beams are of great interest for a wide variety of applications. However, up to now it was impossible to fabricate tunable arrays of these elements. In this Letter, we demonstrate the first array of purely reflective tunable microelectromechanical systems (MEMS) microaxicon mirrors with a conical shape and a continuous surface. The actuation is achieved by thermal expansion in a solid state design and the tuning range allows for large conical angles and is able to form concave as well as convex axicons. The deflection of the mirror surface and the propagation of the resulting quasi-Bessel beams have been characterized to prove the functionality of the device.

© 2013 Optical Society of America

OCIS Codes
(230.3990) Optical devices : Micro-optical devices
(230.4000) Optical devices : Microstructure fabrication
(230.4040) Optical devices : Mirrors
(230.4685) Optical devices : Optical microelectromechanical devices
(130.3990) Integrated optics : Micro-optical devices
(220.1080) Optical design and fabrication : Active or adaptive optics

ToC Category:
Optical Devices

Original Manuscript: April 3, 2013
Manuscript Accepted: April 21, 2013
Published: May 28, 2013

Jens Brunne and Ulrike Wallrabe, "Tunable MEMS axicon mirror arrays," Opt. Lett. 38, 1939-1941 (2013)

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