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Optics Letters

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  • Editor: Alan E. Willner
  • Vol. 38, Iss. 11 — Jun. 1, 2013
  • pp: 1969–1971

Direct writing anisotropy on crystalline silicon surface by linearly polarized femtosecond laser

Pengjun Liu, Lan Jiang, Jie Hu, Weina Han, and Yongfeng Lu  »View Author Affiliations


Optics Letters, Vol. 38, Issue 11, pp. 1969-1971 (2013)
http://dx.doi.org/10.1364/OL.38.001969


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Abstract

An interesting anisotropy phenomenon in femtosecond laser processing of crystalline silicon is revealed by changing the angle between the writing direction and the laser polarization. The experimental results indicate the surface patterning is dependent on the laser polarization direction, showing that it is beneficial to forming continuous, ordered, and better-controlled ripples when the writing direction is parallel to the laser polarization. The anisotropy is attributed mainly to the elliptical shape of the induced ripples. The formation mechanisms of the elliptical ripples are also discussed. This observation promotes the fabrication of self-assembled subwavelength structures, which is important for electro-optic devices.

© 2013 Optical Society of America

OCIS Codes
(220.4000) Optical design and fabrication : Microstructure fabrication
(320.7130) Ultrafast optics : Ultrafast processes in condensed matter, including semiconductors

ToC Category:
Optical Design and Fabrication

History
Original Manuscript: February 4, 2013
Revised Manuscript: April 23, 2013
Manuscript Accepted: May 1, 2013
Published: May 30, 2013

Citation
Pengjun Liu, Lan Jiang, Jie Hu, Weina Han, and Yongfeng Lu, "Direct writing anisotropy on crystalline silicon surface by linearly polarized femtosecond laser," Opt. Lett. 38, 1969-1971 (2013)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-38-11-1969


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