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Optics Letters

Optics Letters


  • Editor: Alan E. Willner
  • Vol. 38, Iss. 13 — Jul. 1, 2013
  • pp: 2250–2252

Multifunctional bowtie-shaped ridge aperture for overlay alignment in plasmonic direct writing lithography using a contact probe

Seonghyeon Oh, Taekyong Lee, and Jae W. Hahn  »View Author Affiliations

Optics Letters, Vol. 38, Issue 13, pp. 2250-2252 (2013)

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We propose a scheme of overlay alignment for plasmonic lithography using a scanning contact probe. Using two resonances of a ridge aperture in a metal film, we introduce the aperture’s multifunctional characteristics for patterning and alignment at different wavelengths. To verify this idea, we measure an image of an alignment mark using a scanning ridge aperture and determine the reference point for the alignment. We then analyze the uncertainty of the alignment method with respect to the image data noise and compare the numerical results with the experimental results. The uncertainty of the overlay alignment method is shown to be less than approximately 2 nm.

© 2013 Optical Society of America

OCIS Codes
(110.1220) Imaging systems : Apertures
(180.5810) Microscopy : Scanning microscopy
(240.6680) Optics at surfaces : Surface plasmons
(110.4235) Imaging systems : Nanolithography
(180.4243) Microscopy : Near-field microscopy

ToC Category:
Imaging Systems

Original Manuscript: March 7, 2013
Revised Manuscript: May 24, 2013
Manuscript Accepted: May 28, 2013
Published: June 24, 2013

Seonghyeon Oh, Taekyong Lee, and Jae W. Hahn, "Multifunctional bowtie-shaped ridge aperture for overlay alignment in plasmonic direct writing lithography using a contact probe," Opt. Lett. 38, 2250-2252 (2013)

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