OSA's Digital Library

Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Editor: Alan E. Willner
  • Vol. 38, Iss. 14 — Jul. 15, 2013
  • pp: 2502–2504

Orthogonal polarization Mirau interferometer using reflective-type waveplate

Abraham Mario Tapilouw, Liang-Chia Chen, Yi-Jun Jen, Shyh-Tsong Lin, and Sheng-Lih Yeh  »View Author Affiliations


Optics Letters, Vol. 38, Issue 14, pp. 2502-2504 (2013)
http://dx.doi.org/10.1364/OL.38.002502


View Full Text Article

Enhanced HTML    Acrobat PDF (404 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

This work proposes an orthogonal polarization Mirau interferometry using a reflective-type waveplate to generate different polarization orientations for broadband white light interferometry. The reflective-type half-waveplate is employed as the reference arm of the Mirau interferometer to convert polarization and it generates a reference light with an orientation orthogonal to the object light. An advantage of the proposed interferometer is its ability to control the ratio of light intensity between the object and reference arms to maximize the interferometric fringe contrast. Better, more accurate calibration of standard step height has been achieved by the developed interferometer, which also can measure solder bumps that traditional Mirau interferometers usually cannot measure.

© 2013 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.4630) Instrumentation, measurement, and metrology : Optical inspection

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: May 3, 2013
Manuscript Accepted: May 31, 2013
Published: July 10, 2013

Citation
Abraham Mario Tapilouw, Liang-Chia Chen, Yi-Jun Jen, Shyh-Tsong Lin, and Sheng-Lih Yeh, "Orthogonal polarization Mirau interferometer using reflective-type waveplate," Opt. Lett. 38, 2502-2504 (2013)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-38-14-2502


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. A. H. Mirau, “Interferometer,” U.S. patent2,612,074 (A) (September30, 1952).
  2. J. C. Stover, Optical Scattering: Measurement and Analysis, 2nd ed. (SPIE, 1995).
  3. G. Häusler and S. Ettl, in Optical Measurement of Surface Topography, R. Leach, ed. (Springer-Verlag, 2011).
  4. G. Häusler, P. Ettl, M. Schenk, G. Bohn, and I. Laszlo, in Proceedings of International Trends in Optics and Photonics ICO IV (1999).
  5. J. Schmit and P. Hariharan, Opt. Eng. 46, 077007 (2007). [CrossRef]
  6. O. V. Lyulko, G. Randers-Pehrson, and D. J. Brenner, Center for Radiological Research (Columbia University, 2009).
  7. O. V. Lyulko, G. Randers-Pehrson, and D. J. Brenner, Proc. SPIE 7568, 756825 (2010). [CrossRef]
  8. Y.-J. Jen, M.-J. Lin, S.-K. Yu, and C.-C. Chen, Opt. Lett. 37, 4296 (2012). [CrossRef]
  9. Y.-J. Jen, C.-Y. Peng, and H.-H. Chang, Opt. Express 15, 4445 (2007). [CrossRef]
  10. M.-C. Park and S.-W. Kim, Opt. Lett. 26, 420 (2001). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

Figures

Fig. 1. Fig. 2. Fig. 3.
 

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited