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Optics Letters

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  • Editor: Alan E. Willner
  • Vol. 38, Iss. 14 — Jul. 15, 2013
  • pp: 2521–2523

Visible wavelength silicon nitride focusing grating coupler with AlCu/TiN reflector

Sebastian Romero-García, Florian Merget, Frank Zhong, Hod Finkelstein, and Jeremy Witzens  »View Author Affiliations


Optics Letters, Vol. 38, Issue 14, pp. 2521-2523 (2013)
http://dx.doi.org/10.1364/OL.38.002521


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Abstract

High-performance silicon nitride focusing grating couplers with AlCu/TiN reflectors for a visible wavelength (660 nm) have been designed and fabricated in a standard complementary metal-oxide-semiconductor pilot line. The influence of the bottom oxide cladding thickness on the grating decay length and efficiency is theoretically and experimentally investigated. It is shown how the metal reflector not only increases the efficiency but also allows reduction of the radiated beam size. Coupling efficiencies above 59% have been measured for compact focusing gratings.

© 2013 Optical Society of America

OCIS Codes
(050.2770) Diffraction and gratings : Gratings
(130.0130) Integrated optics : Integrated optics

ToC Category:
Diffraction and Gratings

History
Original Manuscript: June 7, 2013
Revised Manuscript: June 15, 2013
Manuscript Accepted: June 15, 2013
Published: July 10, 2013

Citation
Sebastian Romero-García, Florian Merget, Frank Zhong, Hod Finkelstein, and Jeremy Witzens, "Visible wavelength silicon nitride focusing grating coupler with AlCu/TiN reflector," Opt. Lett. 38, 2521-2523 (2013)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-38-14-2521


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