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Optics Letters

Optics Letters


  • Editor: Alan E. Willner
  • Vol. 38, Iss. 16 — Aug. 15, 2013
  • pp: 3061–3064

Identification of a dynamical model of a thermally actuated deformable mirror

Aleksandar Haber, Alessandro Polo, Simon Ravensbergen, H. Paul Urbach, and Michel Verhaegen  »View Author Affiliations

Optics Letters, Vol. 38, Issue 16, pp. 3061-3064 (2013)

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Using the subspace identification technique, we identify a finite dimensional, dynamical model of a recently developed prototype of a thermally actuated deformable mirror (TADM). The main advantage of the identified model over the models described by partial differential equations is its low complexity and low dimensionality. Consequently, the identified model can be easily used for high-performance feedback or feed-forward control. The experimental results show good agreement between the dynamical response predicted by the model and the measured response of the TADM.

© 2013 Optical Society of America

OCIS Codes
(010.1080) Atmospheric and oceanic optics : Active or adaptive optics
(220.1000) Optical design and fabrication : Aberration compensation
(230.4040) Optical devices : Mirrors

ToC Category:
Optical Devices

Original Manuscript: June 25, 2013
Revised Manuscript: July 8, 2013
Manuscript Accepted: July 8, 2013
Published: August 8, 2013

Aleksandar Haber, Alessandro Polo, Simon Ravensbergen, H. Paul Urbach, and Michel Verhaegen, "Identification of a dynamical model of a thermally actuated deformable mirror," Opt. Lett. 38, 3061-3064 (2013)

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  1. O. Albert, L. Sherman, G. Mourou, T. B. Norris, and G. Vdovin, Opt. Lett. 25, 52 (2000).
  2. S. Piehler, B. Weichelt, A. Voss, M. Abdou Ahmed, and T. Graf, Opt. Lett. 37, 5033 (2012). [CrossRef]
  3. S. K. Ravensbergen, “Adaptive optics for extreme ultraviolet lithography: actuator design and validation for deformable mirror concepts,” Ph.D. thesis (Technische Universiteit Eindhoven, 2012).
  4. M. Kasprzack, B. Canuel, F. Cavalier, R. Day, E. Genin, J. Marque, D. Sentenac, and G. Vajente, Appl. Opt. 52, 2909 (2013). [CrossRef]
  5. R. Lawrence, D. Ottaway, M. Zucker, and P. Fritschel, Opt. Lett. 29, 2635 (2004).
  6. B. Canuel, R. Day, E. Genin, P. La Penna, and J. Marque, Class. Quantum Grav. 29, 085012 (2012).
  7. G. Vdovin and M. Loktev, Opt. Lett. 27, 677 (2002). [CrossRef]
  8. S. K. Ravensbergen, P.C.J. N. Rosielle, and M. Steinbuch, Precis. Eng. 37, 353 (2013). [CrossRef]
  9. S. E. Winters, J. H. Chung, and S. A. Velinsky, Mech. Based Des. Struc. Mach. 32, 195 (2004).
  10. A. Chiuso, R. Muradore, and E. Marchetti, IEEE Trans. Control Syst. Technol. 18, 705 (2010). [CrossRef]
  11. K. J. Astrom and R. M. Murray, Feedback Systems: An Introduction for Scientists and Engineers (Princeton University, 2009).
  12. H. Song, R. Fraanje, G. Schitter, G. Vdovin, and M. Verhaegen, Eur. J. Control 17, 290 (2011).
  13. A. Polo, A. Haber, S. F. Pereira, M. Verhaegen, and H. P. Urbach, Opt. Express 20, 27922 (2012).
  14. A. Haber, A. Polo, C. S. Smith, S. F. Pereira, H. P. Urbach, and M. Verhaegen, Appl. Opt. 52, 2363 (2013). [CrossRef]
  15. W. Nowacki, Dynamic Problems of Thermoelasticity (Springer, 1975).
  16. S. Timoshenko and S. Woinowsky-Krieger, Theory of Plates and Shells (McGraw-Hill, 1959).
  17. M. Laslandes, E. Hugot, and M. Ferrari, J. Eur. Opt. Soc. Rapid Pub. 7, 12036 (2012).
  18. M. Verhaegen and V. Verdult, Filtering and System Identification: A Least Squares Approach (Cambridge University, 2007).
  19. A. Chiuso, Automatica 43(6), 1034 (2007).
  20. D. Malacara, Optical Shop Testing (Wiley-Interscience, 2007).

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