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Optics Letters

Optics Letters


  • Editor: Alan E. Willner
  • Vol. 38, Iss. 17 — Sep. 1, 2013
  • pp: 3291–3293

Transverse-flow radio-frequency-excited amplifier seeded by a cavity-dumped CO2 laser for an extreme ultraviolet light source

Yoichi Tanino, Junichi Nishimae, Tatsuya Yamamoto, Koji Funaoka, Taichiro Tamida, Shingo Tsuda, and Shuichi Fujikawa  »View Author Affiliations

Optics Letters, Vol. 38, Issue 17, pp. 3291-3293 (2013)

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A transverse-flow radio-frequency-exited CO2 laser amplifier was evaluated by a short-pulse seed laser. We constructed a prototype transverse-flow amplifier for the extreme UV laser-produced-plasma source. The electrical power for the discharge was enhanced to 100 kW at a 100% duty cycle. A Q-switched cavity-dumped CO2 seed laser emitting 13 ns pulses with a repetition rate of 100 kHz was amplified along a fivefold optical path in the amplifier gain medium. As a result, the amplifier output an average power of 3.07 kW with an 8.5 W laser input. The electrical-to-optical efficiency was 3.1%, which was far higher than that of axial-flow amplifiers at the same laser input power. The pulse showed a slight stretch from an input duration of 13 ns to an output of 15 ns.

© 2013 Optical Society of America

OCIS Codes
(140.3280) Lasers and laser optics : Laser amplifiers
(140.3470) Lasers and laser optics : Lasers, carbon dioxide

ToC Category:
Lasers and Laser Optics

Original Manuscript: June 21, 2013
Revised Manuscript: July 15, 2013
Manuscript Accepted: July 26, 2013
Published: August 22, 2013

Yoichi Tanino, Junichi Nishimae, Tatsuya Yamamoto, Koji Funaoka, Taichiro Tamida, Shingo Tsuda, and Shuichi Fujikawa, "Transverse-flow radio-frequency-excited amplifier seeded by a cavity-dumped CO2 laser for an extreme ultraviolet light source," Opt. Lett. 38, 3291-3293 (2013)

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