OSA's Digital Library

Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Editor: Alan E. Willner
  • Vol. 38, Iss. 19 — Oct. 1, 2013
  • pp: 3862–3865

Ultraweak background scattered light reveals structure of a diffractive element

Manabu Hakko, Tomohiro Kiire, Daisuke Barada, Toyohiko Yatagai, and Yoshio Hayasaki  »View Author Affiliations


Optics Letters, Vol. 38, Issue 19, pp. 3862-3865 (2013)
http://dx.doi.org/10.1364/OL.38.003862


View Full Text Article

Enhanced HTML    Acrobat PDF (480 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

Background scattered light should normally be reduced in industrial fabrication processes; however, we demonstrated that background scattered light from an optical element contains significant structural information about the element. This was revealed by quite good agreement between the measured scattering intensity distribution of a sample and a computer simulation of the light intensity from the sample. The intensity distribution from a carefully fabricated sample with artificially controlled defects was obtained with a measurement system designed to measure ultraweak background scattered light covering an intensity range of over 1010.

© 2013 Optical Society of America

OCIS Codes
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.4630) Instrumentation, measurement, and metrology : Optical inspection
(120.5820) Instrumentation, measurement, and metrology : Scattering measurements
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(290.0290) Scattering : Scattering
(290.5820) Scattering : Scattering measurements

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: July 18, 2013
Revised Manuscript: August 25, 2013
Manuscript Accepted: August 30, 2013
Published: September 24, 2013

Citation
Manabu Hakko, Tomohiro Kiire, Daisuke Barada, Toyohiko Yatagai, and Yoshio Hayasaki, "Ultraweak background scattered light reveals structure of a diffractive element," Opt. Lett. 38, 3862-3865 (2013)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-38-19-3862

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited