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Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Editor: Alan E. Willner
  • Vol. 38, Iss. 19 — Oct. 1, 2013
  • pp: 3878–3881

Measurements of the refractive indices and thermo-optic coefficients of Si3N4 and SiOx using microring resonances

Amir Arbabi and Lynford L. Goddard  »View Author Affiliations


Optics Letters, Vol. 38, Issue 19, pp. 3878-3881 (2013)
http://dx.doi.org/10.1364/OL.38.003878


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Abstract

We present a method for determining the core and cladding refractive indices of a microring resonator from its measured quasi-transverse electric and magnetic resonant modes. We use single wavelength reflective microrings to resolve the azimuthal order ambiguity of the measured resonances. We perform accurate electromagnetic simulations to model the dependence of the resonances on geometrical and material parameters. We linearize the model and use the singular value decomposition method to find the best fit parameters for the measured data. At 1550 nm, we determine nSi3N4=1.977±0.003 for stoichiometric silicon nitride deposited using low-pressure chemical vapor deposition (LPCVD) technique and nSiOx=1.428±0.011 for plasma-enhanced chemical vapor deposition (PECVD) oxide. By measuring the temperature sensitivities of microring resonant modes with different polarizations, we find the thermo-optic coefficient of the stoichiometric silicon nitride to be dnSi3N4/dT=(2.45±0.09)×105(RIU/°C) and the PECVD oxide to be dnSiOx/dT=(0.95±0.10)×105(RIU/°C).

© 2013 Optical Society of America

OCIS Codes
(130.0130) Integrated optics : Integrated optics
(160.3130) Materials : Integrated optics materials
(230.5750) Optical devices : Resonators
(310.6860) Thin films : Thin films, optical properties

ToC Category:
Integrated Optics

History
Original Manuscript: July 15, 2013
Revised Manuscript: August 26, 2013
Manuscript Accepted: August 27, 2013
Published: September 26, 2013

Citation
Amir Arbabi and Lynford L. Goddard, "Measurements of the refractive indices and thermo-optic coefficients of Si3N4 and SiOx using microring resonances," Opt. Lett. 38, 3878-3881 (2013)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-38-19-3878


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