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Optics Letters

Optics Letters


  • Editor: Alan E. Willner
  • Vol. 38, Iss. 19 — Oct. 1, 2013
  • pp: 3961–3964

Single-exposure surface profilometry using partitioned aperture wavefront imaging

Roman Barankov and Jerome Mertz  »View Author Affiliations

Optics Letters, Vol. 38, Issue 19, pp. 3961-3964 (2013)

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We demonstrate a technique for instantaneous measurements of surface topography based on the combination of a partitioned aperture wavefront imager with a lamp-based reflection microscope using standard objectives. The technique can operate at video rate over large fields of view, and provides nanometer axial resolution and submicrometer lateral resolution. We discuss performance characteristics of this technique, which we experimentally compare with scanning white light interferometry.

© 2013 Optical Society of America

OCIS Codes
(110.0180) Imaging systems : Microscopy
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.2830) Instrumentation, measurement, and metrology : Height measurements
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.5700) Instrumentation, measurement, and metrology : Reflection
(180.0180) Microscopy : Microscopy

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: July 22, 2013
Revised Manuscript: August 29, 2013
Manuscript Accepted: August 30, 2013
Published: September 30, 2013

Roman Barankov and Jerome Mertz, "Single-exposure surface profilometry using partitioned aperture wavefront imaging," Opt. Lett. 38, 3961-3964 (2013)

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