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Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Editor: Alan E. Willner
  • Vol. 38, Iss. 22 — Nov. 15, 2013
  • pp: 4829–4832

Calibration of a snapshot phase-resolved polarization-sensitive spectral reflectometer

Daesuk Kim, Moonseob Jin, Won Chegal, Jaejong Lee, and Robert Magnusson  »View Author Affiliations


Optics Letters, Vol. 38, Issue 22, pp. 4829-4832 (2013)
http://dx.doi.org/10.1364/OL.38.004829


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Abstract

This Letter describes a universal calibration theory by which conventional interferometry can be extended to vibration robust snapshot polarization-sensitive spectral reflectometry without any complicated optical components or active devices. Experiments for verifying the proposed calibration theory have been conducted by using a Michelson-interferometer-based normal incidence spectroellipsometric system, and also some key system design considerations for object 3D pose tolerant measurement capability have been drawn. The proposed solution enables us to extract the spectroscopic ellipsometric parameter Δ(k) of an anisotropic object within 10 ms with high accuracy.

© 2013 Optical Society of America

OCIS Codes
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.6200) Instrumentation, measurement, and metrology : Spectrometers and spectroscopic instrumentation
(230.5440) Optical devices : Polarization-selective devices

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: August 28, 2013
Manuscript Accepted: October 9, 2013
Published: November 14, 2013

Citation
Daesuk Kim, Moonseob Jin, Won Chegal, Jaejong Lee, and Robert Magnusson, "Calibration of a snapshot phase-resolved polarization-sensitive spectral reflectometer," Opt. Lett. 38, 4829-4832 (2013)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-38-22-4829


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