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Optics Letters

Optics Letters


  • Editor: Alan E. Willner
  • Vol. 38, Iss. 23 — Dec. 1, 2013
  • pp: 5032–5035

Self-scattering effects in femtosecond laser nanoablation

Hao Zhang, Denise M. Krol, Jaap I. Dijkhuis, and Dries van Oosten  »View Author Affiliations

Optics Letters, Vol. 38, Issue 23, pp. 5032-5035 (2013)

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We experimentally investigate the self-reflectivity of intense strongly focused femtosecond laser pulses used for single-shot femtosecond laser ablation of silicon-on-insulator (SOI). We model the self-reflectivity using 2D finite-difference time-domain simulations of a single femtosecond laser pulse interacting with a submicrometer-sized time- and space-dependent plasma induced by the incident pulse itself and find excellent agreement with our experimental results. The simulation shows that the laser-induced plasma scatters the incident pulse into the guided modes of the device layer of the SOI.

© 2013 Optical Society of America

OCIS Codes
(140.3390) Lasers and laser optics : Laser materials processing
(140.3440) Lasers and laser optics : Laser-induced breakdown
(310.2790) Thin films : Guided waves
(320.7090) Ultrafast optics : Ultrafast lasers
(350.3390) Other areas of optics : Laser materials processing

ToC Category:
Lasers and Laser Optics

Original Manuscript: July 29, 2013
Revised Manuscript: October 11, 2013
Manuscript Accepted: October 23, 2013
Published: November 22, 2013

Hao Zhang, Denise M. Krol, Jaap I. Dijkhuis, and Dries van Oosten, "Self-scattering effects in femtosecond laser nanoablation," Opt. Lett. 38, 5032-5035 (2013)

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