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Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Editor: Alan E. Willner
  • Vol. 38, Iss. 7 — Apr. 1, 2013
  • pp: 1031–1033

Air-clad silicon pedestal structures for broadband mid-infrared microphotonics

Pao Tai Lin, Vivek Singh, Yan Cai, Lionel C. Kimerling, and Anu Agarwal  »View Author Affiliations


Optics Letters, Vol. 38, Issue 7, pp. 1031-1033 (2013)
http://dx.doi.org/10.1364/OL.38.001031


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Abstract

Toward mid-infrared (mid-IR) silicon microphotonic circuits, we demonstrate broadband on-chip silicon structures, such as: (i) straight and bent waveguides and (ii) beam splitters, utilizing an air-clad pedestal configuration which eliminates the need for typical mid-IR-lossy oxide cladding. We illustrate a sophisticated fabrication process that can create high-quality pedestal structures in crystalline silicon, while preserving its mid-IR transparency. A fundamental waveguide mode is observed between λ=2.5μm and λ=3.7μm, and an optical loss of 2.7dB/cm is obtained at λ=3.7μm. Our pedestal silicon structures show 5050 mid-IR power splitting enabling the further development of mid-IR silicon microphotonics.

© 2013 Optical Society of America

OCIS Codes
(130.3120) Integrated optics : Integrated optics devices
(220.4000) Optical design and fabrication : Microstructure fabrication

ToC Category:
Integrated Optics

History
Original Manuscript: January 9, 2013
Revised Manuscript: February 14, 2013
Manuscript Accepted: February 15, 2013
Published: March 20, 2013

Citation
Pao Tai Lin, Vivek Singh, Yan Cai, Lionel C. Kimerling, and Anu Agarwal, "Air-clad silicon pedestal structures for broadband mid-infrared microphotonics," Opt. Lett. 38, 1031-1033 (2013)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-38-7-1031

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