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Air-clad silicon pedestal structures for broadband mid-infrared microphotonics |
Optics Letters, Vol. 38, Issue 7, pp. 1031-1033 (2013)
http://dx.doi.org/10.1364/OL.38.001031
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Abstract
Toward mid-infrared (mid-IR) silicon microphotonic circuits, we demonstrate broadband on-chip silicon structures, such as: (i) straight and bent waveguides and (ii) beam splitters, utilizing an air-clad pedestal configuration which eliminates the need for typical mid-IR-lossy oxide cladding. We illustrate a sophisticated fabrication process that can create high-quality pedestal structures in crystalline silicon, while preserving its mid-IR transparency. A fundamental waveguide mode is observed between
© 2013 Optical Society of America
OCIS Codes
(130.3120) Integrated optics : Integrated optics devices
(220.4000) Optical design and fabrication : Microstructure fabrication
ToC Category:
Integrated Optics
History
Original Manuscript: January 9, 2013
Revised Manuscript: February 14, 2013
Manuscript Accepted: February 15, 2013
Published: March 20, 2013
Citation
Pao Tai Lin, Vivek Singh, Yan Cai, Lionel C. Kimerling, and Anu Agarwal, "Air-clad silicon pedestal structures for broadband mid-infrared microphotonics," Opt. Lett. 38, 1031-1033 (2013)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-38-7-1031
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