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Optics Letters

Optics Letters


  • Editor: Alan E. Willner
  • Vol. 38, Iss. 7 — Apr. 1, 2013
  • pp: 1031–1033

Air-clad silicon pedestal structures for broadband mid-infrared microphotonics

Pao Tai Lin, Vivek Singh, Yan Cai, Lionel C. Kimerling, and Anu Agarwal  »View Author Affiliations

Optics Letters, Vol. 38, Issue 7, pp. 1031-1033 (2013)

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Toward mid-infrared (mid-IR) silicon microphotonic circuits, we demonstrate broadband on-chip silicon structures, such as: (i) straight and bent waveguides and (ii) beam splitters, utilizing an air-clad pedestal configuration which eliminates the need for typical mid-IR-lossy oxide cladding. We illustrate a sophisticated fabrication process that can create high-quality pedestal structures in crystalline silicon, while preserving its mid-IR transparency. A fundamental waveguide mode is observed between λ=2.5μm and λ=3.7μm, and an optical loss of 2.7dB/cm is obtained at λ=3.7μm. Our pedestal silicon structures show 5050 mid-IR power splitting enabling the further development of mid-IR silicon microphotonics.

© 2013 Optical Society of America

OCIS Codes
(130.3120) Integrated optics : Integrated optics devices
(220.4000) Optical design and fabrication : Microstructure fabrication

ToC Category:
Integrated Optics

Original Manuscript: January 9, 2013
Revised Manuscript: February 14, 2013
Manuscript Accepted: February 15, 2013
Published: March 20, 2013

Pao Tai Lin, Vivek Singh, Yan Cai, Lionel C. Kimerling, and Anu Agarwal, "Air-clad silicon pedestal structures for broadband mid-infrared microphotonics," Opt. Lett. 38, 1031-1033 (2013)

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  1. X. Liu, R. M. Osgood, Y. A. Vlasov, and W. M. J. Green, Nat. Photonics 4, 557 (2010). [CrossRef]
  2. R. Shankar, R. Leijssen, I. Bulu, and M. Lončar, Opt. Express 19, 5579 (2011). [CrossRef]
  3. R. K. W. Lau, M. Ménard, Y. Okawachi, M. A. Foster, A. C. Turner-Foster, R. Salem, M. Lipson, and A. L. Gaeta, Opt. Lett. 36, 1263 (2011). [CrossRef]
  4. X. Fan and I. M. White, Nat. Photonics 5, 591 (2011). [CrossRef]
  5. J. Ozhikandathil and M. Packirisamy, J. Biomed. Opt. 17, 017006 (2006). [CrossRef]
  6. K. Reddy, Y. Guo, J. Liu, W. Lee, M. K. Khaing, and X. Fan, Lab On Chip 12, 901 (2012). [CrossRef]
  7. P. Y. Yang, S. Stankovic, J. Crnjanski, E. J. Teo, D. Thomson, A. A. Bettiol, M. B. H. Breese, W. Headley, C. Giusca, G. T. Reed, and G. Z. Mashanovich, J. Mater. Sci. Mater. Electron. 20, 159 (2009). [CrossRef]
  8. G. Z. Mashanovich, M. M. Milošević, M. Nedeljkovic, N. Owens, B. Xiong, E. J. Teo, and Y. Hu, Opt. Express 19, 7112 (2011). [CrossRef]
  9. R. Soref, Nat. Photonics 4, 495 (2010). [CrossRef]
  10. Y. Wei, G. Li, Y. Hao, Y. Li, J. Yang, M. Wang, and X. Jiang, Opt. Express 19, 15803 (2011). [CrossRef]
  11. Z. Cheng, X. Chen, C. Y. Wong, K. Xu, C. K. Y. Fung, Y. M. Chen, and H. K. Tsang, IEEE Photon. J. 4, 104 (2012). [CrossRef]
  12. T. Baehr-Jones, A. Spott, R. Ilic, A. Spott, B. Penkov, W. Asher, and M. Hochberg, Opt. Express 18, 12127 (2010). [CrossRef]
  13. F. Li, S. D. Jackson, C. Grillet, E. Magi, D. Hudson, S. J. Madden, Y. Moghe, C. O’Brien, A. Read, S. G. Duvall, P. Atanackovic, B. J. Eggleton, and D. J. Moss, Opt. Express 19, 15212 (2011). [CrossRef]
  14. E. D. Palik, Handbook of Optical Constants of Solids(Academic, 1997).
  15. D. A. Gryvnak and Darrell E. Burch, J. Opt. Soc. Am. 55, 625 (1965). [CrossRef]
  16. H. Gunzler and H. U. Gremlich, IR Spectroscopy: An Introduction (Wiley-VCH, 2002).
  17. R. M. Silverstein, F. X. Webster, and D. Kiemle, Spectrometric Identification of Organic Compounds(Wiley, 2005).
  18. G. Z. Mashanovich, M. M. Milošević, M. Nedeljkovic, N. Owens, B. Xiong, E. J. Teo, and Y. Hu, Opt. Express 19, 7112 (2011). [CrossRef]

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