Digital holography (DH) is a 3D measurement technique with a theoretical axial resolution of better than 1–2 nm. However, practically, the axial resolution has been quoted to be in the range 10–20 nm. One possible reason is that the axial measurement error is much larger so that the theoretical axial resolution cannot be achieved. Until now the axial measurement errors of the DH system have not been thoroughly discussed. In this Letter, the impact of CCD chip size on the axial measurement error is investigated through both simulation and experiment. The results show that a larger CCD size reduces the axial measurement error and improves the measurement accuracy of edges.
© 2013 Optical Society of America
Original Manuscript: November 26, 2012
Revised Manuscript: February 21, 2013
Manuscript Accepted: February 26, 2013
Published: April 1, 2013
Yan Hao and Anand Asundi, "Impact of charge-coupled device size on axial measurement error in digital holographic system," Opt. Lett. 38, 1194-1196 (2013)