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Optics Letters

Optics Letters


  • Editor: Alan E. Willner
  • Vol. 38, Iss. 9 — May. 1, 2013
  • pp: 1416–1418

Experimental demonstration of ultracompact air hole photonic crystal ring resonator fabricated on silicon-on-insulator wafer

Xiaoyuan Ren, Lishuang Feng, Zhili Lin, and Junbo Feng  »View Author Affiliations

Optics Letters, Vol. 38, Issue 9, pp. 1416-1418 (2013)

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A photonic crystal ring resonator (PCRR) of air hole arrays is fabricated on a silicon-on-insulator wafer by using electron-beam lithography and inductively coupled plasma etching. The designed PCRR is modeled and its performance is simulated by the two-dimensional finite difference time domain method. The simulation results show that the PCRR has two resonant wavelengths, 1598 and 1606 nm, and their corresponding quality factors are 3994 and 4015, respectively. A sample of the PCRR structure is fabricated and tested by the established experimental setup. Compared with the simulation results, the experimental resonant wavelengths drift to some extent and the quality factors are reduced by about one order of magnitude. The fabrication error and irregularity are the main reasons for the above results, which can be further reduced by improving the process technology. In addition, one more resonant wavelength emerged for the PCRR sample, which can be attributed to the change of the coupling strength.

© 2013 Optical Society of America

OCIS Codes
(130.0130) Integrated optics : Integrated optics
(230.5750) Optical devices : Resonators
(220.4241) Optical design and fabrication : Nanostructure fabrication
(160.5298) Materials : Photonic crystals

ToC Category:
Optical Devices

Original Manuscript: December 18, 2012
Revised Manuscript: March 6, 2013
Manuscript Accepted: March 22, 2013
Published: April 24, 2013

Xiaoyuan Ren, Lishuang Feng, Zhili Lin, and Junbo Feng, "Experimental demonstration of ultracompact air hole photonic crystal ring resonator fabricated on silicon-on-insulator wafer," Opt. Lett. 38, 1416-1418 (2013)

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