We have experimentally demonstrated a compact, integrated optical hydrogen sensor on a silicon-on-insulator platform. The sensor consists of silicon waveguide coated with a thin palladium film. The sensitivity and response time of the sensor was tested for volumetric hydrogen concentrations ranging from 0% to 4%. The proposed hydrogen sensor shows great potential as a building block for an optical nose capable of simultaneous detection of multiple gases as well as environmental effects such as temperature and humidity.
© 2013 Optical Society of America
Remote Sensing and Sensors
Original Manuscript: February 20, 2013
Manuscript Accepted: March 12, 2013
Published: April 24, 2013
M. Z. Alam, Nicholas Carriere, Farshid Bahrami, Mo Mojahedi, and J. Stewart Aitchison, "Pd-based integrated optical hydrogen sensor on a silicon-on-insulator platform," Opt. Lett. 38, 1428-1430 (2013)