We demonstrated high-index-contrast, waveguide-coupled As2Se3 chalcogenide glass resonators monolithically integrated on silicon fabricated using optical lithography and a lift-off process. The resonators exhibited a high intrinsic quality factor of 2×105 at 5.2 μm wavelength, which is among the highest values reported in on-chip mid-infrared (mid-IR) photonic devices. The resonator can serve as a key building block for mid-IR planar photonic circuits.
© 2013 Optical Society of America
Original Manuscript: February 20, 2013
Revised Manuscript: March 18, 2013
Manuscript Accepted: March 26, 2013
Published: April 26, 2013
Hongtao Lin, Lan Li, Yi Zou, Sylvain Danto, J. David Musgraves, Kathleen Richardson, Stephen Kozacik, Maciej Murakowski, Dennis Prather, Pao T. Lin, Vivek Singh, Anu Agarwal, Lionel C. Kimerling, and Juejun Hu, "Demonstration of high-Q mid-infrared chalcogenide glass-on-silicon resonators," Opt. Lett. 38, 1470-1472 (2013)