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Optics Letters

Optics Letters


  • Editor: Xi-Cheng Zhang
  • Vol. 39, Iss. 12 — Jun. 15, 2014
  • pp: 3449–3452

Integrated silicon and silicon nitride photonic circuits on flexible substrates

Yu Chen and Mo Li  »View Author Affiliations

Optics Letters, Vol. 39, Issue 12, pp. 3449-3452 (2014)

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Flexible integrated photonic devices based on crystalline materials on plastic substrates have a promising potential in many unconventional applications. In this Letter, we demonstrate a fully integrated photonic system including ring resonators and grating couplers, based on both crystalline silicon and silicon nitride, on flexible plastic substrate by using the stamping-transfer method. A high yield has been achieved by a simple, yet reliable transfer method without significant performance degradation.

© 2014 Optical Society of America

OCIS Codes
(130.3120) Integrated optics : Integrated optics devices
(220.4241) Optical design and fabrication : Nanostructure fabrication

ToC Category:
Optical Design and Fabrication

Original Manuscript: March 24, 2014
Revised Manuscript: May 4, 2014
Manuscript Accepted: May 5, 2014
Published: June 5, 2014

Yu Chen and Mo Li, "Integrated silicon and silicon nitride photonic circuits on flexible substrates," Opt. Lett. 39, 3449-3452 (2014)

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