Flexible integrated photonic devices based on crystalline materials on plastic substrates have a promising potential in many unconventional applications. In this Letter, we demonstrate a fully integrated photonic system including ring resonators and grating couplers, based on both crystalline silicon and silicon nitride, on flexible plastic substrate by using the stamping-transfer method. A high yield has been achieved by a simple, yet reliable transfer method without significant performance degradation.
© 2014 Optical Society of America
Optical Design and Fabrication
Original Manuscript: March 24, 2014
Revised Manuscript: May 4, 2014
Manuscript Accepted: May 5, 2014
Published: June 5, 2014
Yu Chen and Mo Li, "Integrated silicon and silicon nitride photonic circuits on flexible substrates," Opt. Lett. 39, 3449-3452 (2014)