OSA's Digital Library

Optics Letters

Optics Letters


  • Editor: Xi-Cheng Zhang
  • Vol. 39, Iss. 12 — Jun. 15, 2014
  • pp: 3480–3483

Broadband all-electronically tunable MEMS terahertz quantum cascade lasers

Ningren Han, Alexander de Geofroy, David P. Burghoff, Chun Wang I. Chan, Alan Wei Min Lee, John L. Reno, and Qing Hu  »View Author Affiliations

Optics Letters, Vol. 39, Issue 12, pp. 3480-3483 (2014)

View Full Text Article

Enhanced HTML    Acrobat PDF (595 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



In this work, we demonstrate all-electronically tunable terahertz quantum cascade lasers (THz QCLs) with MEMS tuner structures. A two-stage MEMS tuner device is fabricated by a commercial open-foundry process performed by the company MEMSCAP. This provides an inexpensive, rapid, and reliable approach for MEMS tuner fabrication for THz QCLs with a high-precision alignment scheme. In order to electronically actuate the MEMS tuner device, an open-loop cryogenic piezo nanopositioning stage is integrated with the device chip. Our experimental result shows that at least 240 GHz of single-mode continuous electronic tuning can be achieved in cryogenic environments (4K) without mode hopping. This provides an important step toward realizing turn-key bench-top tunable THz coherent sources for spectroscopic and coherent tomography applications.

© 2014 Optical Society of America

OCIS Codes
(140.3070) Lasers and laser optics : Infrared and far-infrared lasers
(230.4685) Optical devices : Optical microelectromechanical devices

ToC Category:
Lasers and Laser Optics

Original Manuscript: April 28, 2014
Manuscript Accepted: May 7, 2014
Published: June 5, 2014

Virtual Issues
Vol. 9, Iss. 8 Virtual Journal for Biomedical Optics

Ningren Han, Alexander de Geofroy, David P. Burghoff, Chun Wang I. Chan, Alan Wei Min Lee, John L. Reno, and Qing Hu, "Broadband all-electronically tunable MEMS terahertz quantum cascade lasers," Opt. Lett. 39, 3480-3483 (2014)

Sort:  Author  |  Year  |  Journal  |  Reset  


  1. R. Köhler, A. Tredicucci, F. Beltram, H. E. Beere, E. H. Linfield, A. G. Davies, D. A. Ritchie, R. C. Iotti, and F. Rossi, Nature 417, 156 (2002). [CrossRef]
  2. B. S. Williams, Nat. Photonics 1, 517 (2007). [CrossRef]
  3. M. Brandstetter, C. Deutsch, M. Krall, H. Detz, D. C. MacFarland, T. Zederbauer, A. M. Andrews, W. Schrenk, G. Strasser, and K. Unterrainer, Appl. Phys. Lett. 103, 171113 (2013). [CrossRef]
  4. S. Fathololoumi, E. Dupont, C. W. I. Chan, Z. R. Wasilewski, S. R. Laframboise, D. Ban, A. Mátyás, C. Jirauschek, Q. Hu, and H. C. Liu, Opt. Express 20, 3866 (2012). [CrossRef]
  5. Q. Qin, B. S. Williams, S. Kumar, J. L. Reno, and Q. Hu, Nat. Photonics 3, 732 (2009). [CrossRef]
  6. Q. Qin, J. L. Reno, and Q. Hu, Opt. Lett. 36, 692 (2011). [CrossRef]
  7. M. I. Amanti, M. Fischer, G. Scalari, M. Beck, and J. Faist, Nat. Photonics 3, 586 (2009). [CrossRef]
  8. T.-Y. Kao, Q. Hu, and J. L. Reno, Opt. Lett. 37, 2070 (2012). [CrossRef]
  9. D. Burghoff, T.-Y. Kao, N. Han, I. C. W. Chan, X. Cai, Y. Yang, D. J. Hayton, J. R. Gao, J. L. Reno, and Q. Hu, Nat. Photonics8, doi: 10.1038/nphoton.2014.85 (2014).
  10. B. Ferguson and X.-C. Zhang, Nat. Mater. 1, 26 (2002). [CrossRef]
  11. A. Wei Min Lee, T.-Y. Kao, D. Burghoff, Q. Hu, and J. L. Reno, Opt. Lett. 37, 217 (2012). [CrossRef]
  12. K. Vijayraghavan, Y. Jiang, M. Jang, A. Jiang, K. Choutagunta, A. Vizbaras, F. Demmerle, G. Boehm, M. C. Amann, and M. A. Belkin, Nat. Commun. 4, 2021 (2013). [CrossRef]
  13. M. S. Vitiello and A. Tredicucci, IEEE Trans. Terahertz Sci. Technol. 1, 76 (2011).
  14. Q. Qin and Q. Hu, J. Micromech. Microeng. 21, 075004 (2011). [CrossRef]
  15. A. Cowen, G. Hames, D. Monk, S. Wilcenski, and B. Hardy, SOIMUMPs Design Handbook, (MEMSCAP Inc., 2011), Revision 8.0.
  16. Q. Qin, N. Han, T. Kao, J. L. Reno, and Q. Hu, Opt. Lett. 38, 407 (2013). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited