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Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Editor: Xi-Cheng Zhang
  • Vol. 39, Iss. 13 — Jul. 1, 2014
  • pp: 3748–3751

Etching of nanostructures on soda-lime glass

Elmer Wang and Yang Zhao  »View Author Affiliations


Optics Letters, Vol. 39, Issue 13, pp. 3748-3751 (2014)
http://dx.doi.org/10.1364/OL.39.003748


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Abstract

Nanostructures were created on the surface of optical glass using nanosphere lithography. The substrates were etched with vapor-phase hydrofluoric (HF) acid. The etching rate was studied and compared with existing results of wet and dry HF etching. An empirical etching rate formula is found for etching depth up to 300 nm. The subsequent artificial material layer demonstrated enhanced transmittance in optical wavelengths.

© 2014 Optical Society of America

OCIS Codes
(160.2750) Materials : Glass and other amorphous materials
(110.4235) Imaging systems : Nanolithography
(220.4241) Optical design and fabrication : Nanostructure fabrication
(310.6628) Thin films : Subwavelength structures, nanostructures

ToC Category:
Materials

History
Original Manuscript: May 1, 2014
Revised Manuscript: May 25, 2014
Manuscript Accepted: May 26, 2014
Published: June 18, 2014

Citation
Elmer Wang and Yang Zhao, "Etching of nanostructures on soda-lime glass," Opt. Lett. 39, 3748-3751 (2014)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-39-13-3748


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