OSA's Digital Library

Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Editor: Xi-Cheng Zhang
  • Vol. 39, Iss. 13 — Jul. 1, 2014
  • pp: 3764–3766

Limits of diffractometric reconstruction of line gratings when using scalar diffraction theory

Sandy Peterhänsel, Christof Pruss, and Wolfgang Osten  »View Author Affiliations


Optics Letters, Vol. 39, Issue 13, pp. 3764-3766 (2014)
http://dx.doi.org/10.1364/OL.39.003764


View Full Text Article

Enhanced HTML    Acrobat PDF (551 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

We study errors that occur in geometry and phase reconstruction when using scalar diffraction theory in line gratings with periods below 10 μm. The application of those gratings in so-called computer-generated holograms in high-precision interferometric testing of aspheres and free-form surfaces imposes high demands on the generated phase, leading to error budgets in the range of λ/100. Using rigorous simulations as references, we identify the limits where scalar diffraction theory fails to accurately describe grating geometries and identify the significant error mechanisms.

© 2014 Optical Society of America

OCIS Codes
(050.0050) Diffraction and gratings : Diffraction and gratings
(100.3190) Image processing : Inverse problems
(050.2065) Diffraction and gratings : Effective medium theory

ToC Category:
Diffraction and Gratings

History
Original Manuscript: April 17, 2014
Revised Manuscript: May 22, 2014
Manuscript Accepted: May 23, 2014
Published: June 18, 2014

Citation
Sandy Peterhänsel, Christof Pruss, and Wolfgang Osten, "Limits of diffractometric reconstruction of line gratings when using scalar diffraction theory," Opt. Lett. 39, 3764-3766 (2014)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-39-13-3764


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. J. C. Wyant and V. P. Bennett, Appl. Opt. 11, 2833 (1972). [CrossRef]
  2. S. M. Arnold, Proc. SPIE 1052, 191 (1989).
  3. J. D. Gaskill, Linear Systems, Fourier Transforms and Optics, (Wiley, 1978).
  4. E.-B. Kley, W. Rockstroh, H. Schmidt, A. Drauschke, F. Wyrowski, and L.-C. Wittig, Proc. SPIE 4440, 135 (2001).
  5. S. Reichelt, C. Pruss, and H. J. Tiziani, Proc. Soc. Photo-Opt. Instrum. Eng. 4778, 158 (2002).
  6. W. Iff, S. Glaubrecht, N. Lindlein, and J. Schwider, in DGaO (Deutsche Gesellschaft für angewandte Optik) Proceedings http://www.dgao-proceedings.de (2010).
  7. J. Ma, C. Pruss, M. Häfner, B. Heitkamp, R. Zhu, Z. Gao, C. Yuan, and W. Osten, Opt. Eng. 50, 055801 (2011). [CrossRef]
  8. W. Cai, P. Zhou, C. Zhao, and J. H. Burge, Opt. Eng. 52, 124101 (2013). [CrossRef]
  9. S. Peterhänsel, C. Pruss, and W. Osten, Opt. Express 21, 11638 (2013). [CrossRef]
  10. S. T. Peng, T. Tamir, and H. L. Bertoni, IEEE Trans. Microwave Theor. Tech. 23, 123 (1975). [CrossRef]
  11. M. G. Moharam, E. B. Grann, D. A. Pommet, and T. K. Gaylord, J. Opt. Soc. Am. A 12, 1068 (1995). [CrossRef]
  12. Ph. Lalanne and G. M. Morris, J. Opt. Soc. Am. A 13, 779 (1996). [CrossRef]
  13. G. Garnet and B. Guzial, J. Opt. Soc. Am. A 13, 1019 (1996). [CrossRef]
  14. L. Li, J. Opt. Soc. Am. A 13, 1870 (1996). [CrossRef]
  15. Y.-C. Chang, P. Zhou, and J. H. Burge, Appl. Opt. 45, 4223 (2006). [CrossRef]
  16. G. J. Swanson, “Binary optics technology: theoretical limits on the diffraction efficiency of multilevel diffractive optical elements,” technical report (Massachusetts Institute of Technology, 1991).
  17. U. Levy, E. Marom, and D. Mendlovic, Opt. Commun. 299, 11 (2003).
  18. H. Wang, D. Kuang, and Z. Fang, J. Opt. Soc. Am. A 25, 1253 (2008). [CrossRef]
  19. G. Moulin, F. Goudail, P. Chavel, and D. Kuang, J. Opt. Soc. Am. A 26, 767 (2009). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited