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Optics Letters

Optics Letters


  • Editor: Xi-Cheng Zhang
  • Vol. 39, Iss. 13 — Jul. 1, 2014
  • pp: 3764–3766

Limits of diffractometric reconstruction of line gratings when using scalar diffraction theory

Sandy Peterhänsel, Christof Pruss, and Wolfgang Osten  »View Author Affiliations

Optics Letters, Vol. 39, Issue 13, pp. 3764-3766 (2014)

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We study errors that occur in geometry and phase reconstruction when using scalar diffraction theory in line gratings with periods below 10 μm. The application of those gratings in so-called computer-generated holograms in high-precision interferometric testing of aspheres and free-form surfaces imposes high demands on the generated phase, leading to error budgets in the range of λ/100. Using rigorous simulations as references, we identify the limits where scalar diffraction theory fails to accurately describe grating geometries and identify the significant error mechanisms.

© 2014 Optical Society of America

OCIS Codes
(050.0050) Diffraction and gratings : Diffraction and gratings
(100.3190) Image processing : Inverse problems
(050.2065) Diffraction and gratings : Effective medium theory

ToC Category:
Diffraction and Gratings

Original Manuscript: April 17, 2014
Revised Manuscript: May 22, 2014
Manuscript Accepted: May 23, 2014
Published: June 18, 2014

Sandy Peterhänsel, Christof Pruss, and Wolfgang Osten, "Limits of diffractometric reconstruction of line gratings when using scalar diffraction theory," Opt. Lett. 39, 3764-3766 (2014)

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