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Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Editor: Xi-Cheng Zhang
  • Vol. 39, Iss. 14 — Jul. 15, 2014
  • pp: 4267–4270

Optical microscope for three-dimensional surface displacement and shape measurements at the microscale

Shuman Xia, Zhipeng Pan, and Jingwen Zhang  »View Author Affiliations


Optics Letters, Vol. 39, Issue 14, pp. 4267-4270 (2014)
http://dx.doi.org/10.1364/OL.39.004267


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Abstract

We report a novel optical microscope for full-field, noncontact measurements of three-dimensional (3D) surface deformation and topography at the microscale. The microscope system is based on a seamless integration of the diffraction-assisted image correlation (DAIC) method with fluorescent microscopy. We experimentally demonstrate the microscope’s capability for 3D measurements with submicrometer spatial resolution and subpixel measurement accuracy.

© 2014 Optical Society of America

OCIS Codes
(050.0050) Diffraction and gratings : Diffraction and gratings
(100.2000) Image processing : Digital image processing
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(180.6900) Microscopy : Three-dimensional microscopy

ToC Category:
Medical Optics and Biotechnology

History
Original Manuscript: December 30, 2013
Manuscript Accepted: May 26, 2014
Published: July 15, 2014

Citation
Shuman Xia, Zhipeng Pan, and Jingwen Zhang, "Optical microscope for three-dimensional surface displacement and shape measurements at the microscale," Opt. Lett. 39, 4267-4270 (2014)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-39-14-4267


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