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Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Editor: Xi-Cheng Zhang
  • Vol. 39, Iss. 17 — Sep. 1, 2014
  • pp: 5162–5165

Fine-tuned grayscale optofluidic maskless lithography for three-dimensional freeform shape microstructure fabrication

Suk-Heung Song, Kibeom Kim, Sung-Eun Choi, Sangkwon Han, Ho-Suk Lee, Sunghoon Kwon, and Wook Park  »View Author Affiliations


Optics Letters, Vol. 39, Issue 17, pp. 5162-5165 (2014)
http://dx.doi.org/10.1364/OL.39.005162


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Abstract

This article presents free-floating three-dimensional (3D) microstructure fabrication in a microfluidic channel using direct fine-tuned grayscale image lithography. The image is designed as a freeform shape and is composed of gray shades as light-absorbing features. Gray shade levels are modulated through multiple reflections of light in a digital micromirror device (DMD) to produce different height formations. Whereas conventional photolithography has several limitations in producing grayscale colors on photomask features, our method focuses on a maskless, single-shot process for fabrication of freeform 3D micro-scale shapes. The fine-tuned gray image is designed using an 8-bit grayscale color; thus, each pixel is capable of displaying 256 gray shades. The pattern of the UV light reflecting on the DMD is transferred to a photocurable resin flowing through a microfluidic channel. Here, we demonstrate diverse free-floating 3D microstructure fabrication using fine-tuned grayscale image lithography. Additionally, we produce polymeric microstructures with locally embedded gray encoding patterns, such as grayscale-encoded microtags. This functional microstructure can be applied to a biophysical detection system combined with 3D microstructures. This method would be suitable for fabricating 3D microstructures that have a specific morphology to be used for particular biological or medical applications.

© 2014 Optical Society of America

OCIS Codes
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.3740) Optical design and fabrication : Lithography
(220.4000) Optical design and fabrication : Microstructure fabrication

ToC Category:
Optical Design and Fabrication

History
Original Manuscript: June 13, 2014
Revised Manuscript: July 23, 2014
Manuscript Accepted: July 23, 2014
Published: August 27, 2014

Citation
Suk-Heung Song, Kibeom Kim, Sung-Eun Choi, Sangkwon Han, Ho-Suk Lee, Sunghoon Kwon, and Wook Park, "Fine-tuned grayscale optofluidic maskless lithography for three-dimensional freeform shape microstructure fabrication," Opt. Lett. 39, 5162-5165 (2014)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-39-17-5162


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