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Optics Letters

Optics Letters


  • Editor: Xi-Cheng Zhang
  • Vol. 39, Iss. 17 — Sep. 1, 2014
  • pp: 5184–5187

128 × 128 long-wavelength/mid-wavelength two-color HgCdTe infrared focal plane array detector with ultralow spectral cross talk

Weida Hu, Zhenhua Ye, Lei Liao, Honglei Chen, Lu Chen, Ruijun Ding, Li He, Xiaoshuang Chen, and Wei Lu  »View Author Affiliations

Optics Letters, Vol. 39, Issue 17, pp. 5184-5187 (2014)

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High temporal and spatial coherent simultaneous long-wavelength/mid-wavelength (LW/MW) two-color focal plane array (FPA) infrared detection is the cutting-edge technique for third-generation infrared remote sensing. In this Letter, HgCdTe LW/MW two-color infrared detectors were designed and fabricated. The top long-wavelength and bottom mid-wavelength infrared planar photodiodes were processed by selective B+-implantation after etching the long-wavelength epilayer into a curvature and exposing the mid-wavelength layers for the implantation of the n region of the MW photodiode by a micro-mesa array technique. A 128×128MW/LW HgCdTe infrared FPA detector is fabricated photo-lithographically by simultaneous nonplanar B+-implantation of the LW and MW photodiodes, passivation and metallization of the sidewalls, mesa isolation, and flip-chip hybridization with a read-out integrated circuit. The inner mechanisms for suppressing the cross talk and improving photoresponse have been carried out by combining experimental work with numerical simulations.

© 2014 Optical Society of America

OCIS Codes
(040.1240) Detectors : Arrays
(040.1880) Detectors : Detection
(040.3060) Detectors : Infrared
(040.5160) Detectors : Photodetectors
(110.3080) Imaging systems : Infrared imaging

ToC Category:

Original Manuscript: June 18, 2014
Revised Manuscript: July 29, 2014
Manuscript Accepted: July 29, 2014
Published: August 27, 2014

Weida Hu, Zhenhua Ye, Lei Liao, Honglei Chen, Lu Chen, Ruijun Ding, Li He, Xiaoshuang Chen, and Wei Lu, "128 × 128 long-wavelength/mid-wavelength two-color HgCdTe infrared focal plane array detector with ultralow spectral cross talk," Opt. Lett. 39, 5184-5187 (2014)

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