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Optics Letters

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  • Editor: Xi-Cheng Zhang
  • Vol. 39, Iss. 17 — Sep. 1, 2014
  • pp: 5240–5243

Polarization-independent etching of fused silica based on electrons dynamics control by shaped femtosecond pulse trains for microchannel fabrication

X. Yan, L. Jiang, X. Li, K. Zhang, B. Xia, P. Liu, L. Qu, and Y. Lu  »View Author Affiliations


Optics Letters, Vol. 39, Issue 17, pp. 5240-5243 (2014)
http://dx.doi.org/10.1364/OL.39.005240


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Abstract

We propose an approach to realize polarization-independent etching of fused silica by using temporally shaped femtosecond pulse trains to control the localized transient electrons dynamics. Instead of nanograting formation using traditional unshaped pulses, for the pulse delay of pulse trains larger than 1 ps, coherent field-vector-related coupling is not possible and field orientation is lost. The exponential growth of the periodic structures is interrupted. In this case, disordered and interconnected nanostructures are formed, which is probably the main reason of etching independence on the laser polarization. As an application example, square-wave-shaped and arc-shaped microchannels are fabricated by using pulse trains to demonstrate the advantage of the proposed method in fabricating high-aspect-ratio and three-dimensional microchannels.

© 2014 Optical Society of America

OCIS Codes
(140.3390) Lasers and laser optics : Laser materials processing
(220.4000) Optical design and fabrication : Microstructure fabrication

ToC Category:
Optical Devices

History
Original Manuscript: July 4, 2014
Revised Manuscript: August 2, 2014
Manuscript Accepted: August 5, 2014
Published: August 29, 2014

Citation
X. Yan, L. Jiang, X. Li, K. Zhang, B. Xia, P. Liu, L. Qu, and Y. Lu, "Polarization-independent etching of fused silica based on electrons dynamics control by shaped femtosecond pulse trains for microchannel fabrication," Opt. Lett. 39, 5240-5243 (2014)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-39-17-5240


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