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Optics Letters

Optics Letters


  • Editor: Xi-Cheng Zhang
  • Vol. 39, Iss. 2 — Jan. 15, 2014
  • pp: 299–302

Nanostep height measurement via spatial mode projection

N. Hermosa, C. Rosales-Guzmán, S. F. Pereira, and J. P. Torres  »View Author Affiliations

Optics Letters, Vol. 39, Issue 2, pp. 299-302 (2014)

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We demonstrate an optical scheme for measuring the thickness of thin nanolayers with the use of light beam’s spatial modes. The novelty in our scheme is the projection of the beam reflected by the sample onto a properly tailored spatial mode. In the experiment described below, we are able to measure a step height smaller than 10 nm, i.e., one-eightieth (1/80) of the wavelength with a standard error in the picometer scale. Since our scheme enhances the signal-to-noise ratio, which effectively increases the sensitivity of detection, the extension of this technique to the detection of subnanometric layer thicknesses is feasible.

© 2014 Optical Society of America

OCIS Codes
(120.2830) Instrumentation, measurement, and metrology : Height measurements
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(130.6010) Integrated optics : Sensors
(310.6628) Thin films : Subwavelength structures, nanostructures

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: November 5, 2013
Manuscript Accepted: November 28, 2013
Published: January 8, 2014

N. Hermosa, C. Rosales-Guzmán, S. F. Pereira, and J. P. Torres, "Nanostep height measurement via spatial mode projection," Opt. Lett. 39, 299-302 (2014)

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  1. Z. H. Lu, J. P. McCaffrey, B. Brar, G. D. Wilk, R. M. Wallace, L. C. Feldman, and S. P. Tay, Appl. Phys. Lett. 71, 2764 (1997). [CrossRef]
  2. H.-U. Danzebrink, L. Koenders, G. Wilkening, A. Yacoot, and H. Kunzmannl, CIRP Ann. 55, 841 (2006).
  3. M. Losurdo, M. Bergmair, G. Bruno, D. Cattelan, C. Cobet, A. de Martino, K. Fleischer, Z. Dohcevic-Mitrovic, N. Esser, M. Galliet, R. Gajic, D. Hemzal, K. Hingerl, J. Humlicek, R. Ossikovski, Z. V. Popovic, and O. Saxl, J. Nanopart. Res. 11, 1521 (2009). [CrossRef]
  4. N. Matsuda, R. Shimizu, Y. Mitsumori, H. Kosaka, and K. Edamatsu, Nat. Photonics 3, 95 (2009). [CrossRef]
  5. N. Matsuda, Y. Mitsumori, H. Kosaka, K. Edamatsu, and R. Shimizu, Appl. Phys. Lett. 91, 171119 (2007). [CrossRef]
  6. S. Fürhapter, A. Jesacher, S. Bernet, and M. Ritsch-Marte, Opt. Express 13, 689 (2005). [CrossRef]
  7. J. Dyson, J. Opt. Soc. Am. 47, 386 (1957). [CrossRef]
  8. J. Glückstad and P. C. Mogensen, Appl. Opt. 40, 268 (2001). [CrossRef]
  9. J. Dyson, Nature 171, 743 (1953). [CrossRef]
  10. M. Zhao, W. Cho, F. E. Regnier, and D. D. Nolte, Appl. Opt. 46, 6196 (2007). [CrossRef]
  11. M. M. Varma, H. D. Inerowicz, F. E. Regnier, and D. D. Nolte, Opt. Lett. 29, 950 (2004). [CrossRef]
  12. M. M. Varma, H. D. Inerowicz, F. E. Regnier, and D. D. Nolte, Biosens. Bioelectron. 19, 1371 (2004). [CrossRef]
  13. B. P. Blake, E. W. Hill, A. H. Castro Neto, K. S. Novoselov, D. Jianf, R. Yang, T. J. Booth, and A. K. Geim, Appl. Phys. Lett. 91, 063124 (2007). [CrossRef]
  14. C. W. Freudiger, W. Min, B. G. Saar, S. Lu, G. R. Holtom, C. He, J. C. Tsai, J. X. Kang, and X. S. Xie, Science 322, 1857 (2008). [CrossRef]
  15. B. G. Saar, C. W. Freudiger, J. Reichman, C. M. Stanley, G. R. Holtom, and X. S. Xie, Science 330, 1368 (2010). [CrossRef]

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