OSA's Digital Library

Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Editor: Xi-Cheng Zhang
  • Vol. 39, Iss. 2 — Jan. 15, 2014
  • pp: 402–404

Fourier spectrum method to determine dose-to-clear in a photoresist

Lei Sun, Obert Wood, Chris Clifford, Sudhar Raghunathan, Oleg Kritsun, Myungjun Lee, Ryoung-Han Kim, Pawitter Mangat, Hui Peng Koh, and Harry Levinson  »View Author Affiliations


Optics Letters, Vol. 39, Issue 2, pp. 402-404 (2014)
http://dx.doi.org/10.1364/OL.39.000402


View Full Text Article

Enhanced HTML    Acrobat PDF (503 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

A Fourier spectrum method to determine the dose-to-clear in a photoresist is proposed. The frequency content of scanning electron microscope resist images is used to determine whether the resist has been dissolved. Using this method, the dose to clear the resist is calculated automatically instead of via visual inspection, a method in which operator influence can affect the result.

© 2014 Optical Society of America

OCIS Codes
(070.4790) Fourier optics and signal processing : Spectrum analysis
(100.2960) Image processing : Image analysis
(340.7480) X-ray optics : X-rays, soft x-rays, extreme ultraviolet (EUV)
(290.2648) Scattering : Stray light
(110.4235) Imaging systems : Nanolithography

ToC Category:
Fourier Optics and Signal Processing

History
Original Manuscript: August 2, 2013
Revised Manuscript: December 4, 2013
Manuscript Accepted: December 9, 2013
Published: January 15, 2014

Citation
Lei Sun, Obert Wood, Chris Clifford, Sudhar Raghunathan, Oleg Kritsun, Myungjun Lee, Ryoung-Han Kim, Pawitter Mangat, Hui Peng Koh, and Harry Levinson, "Fourier spectrum method to determine dose-to-clear in a photoresist," Opt. Lett. 39, 402-404 (2014)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-39-2-402

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited