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Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Editor: Xi-Cheng Zhang
  • Vol. 39, Iss. 4 — Feb. 15, 2014
  • pp: 1061–1064

Polycrystalline silicon ring resonator photodiodes in a bulk complementary metal-oxide-semiconductor process

Karan K. Mehta, Jason S. Orcutt, Jeffrey M. Shainline, Ofer Tehar-Zahav, Zvi Sternberg, Roy Meade, Miloš A. Popović, and Rajeev J. Ram  »View Author Affiliations


Optics Letters, Vol. 39, Issue 4, pp. 1061-1064 (2014)
http://dx.doi.org/10.1364/OL.39.001061


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Abstract

We present measurements on resonant photodetectors utilizing sub-bandgap absorption in polycrystalline silicon ring resonators, in which light is localized in the intrinsic region of a p+/p/i/n/n+ diode. The devices, operating both at λ=1280 and λ=1550nm and fabricated in a complementary metal-oxide-semiconductor (CMOS) dynamic random-access memory emulation process, exhibit detection quantum efficiencies around 20% and few-gigahertz response bandwidths. We observe this performance at low reverse biases in the range of a few volts and in devices with dark currents below 50 pA at 10 V. These results demonstrate that such photodetector behavior, previously reported by Preston et al. [Opt. Lett. 36, 52 (2011)], is achievable in bulk CMOS processes, with significant improvements with respect to the previous work in quantum efficiency, dark current, linearity, bandwidth, and operating bias due to additional midlevel doping implants and different material deposition. The present work thus offers a robust realization of a fully CMOS-fabricated all-silicon photodetector functional across a wide wavelength range.

© 2014 Optical Society of America

OCIS Codes
(040.5160) Detectors : Photodetectors
(130.3120) Integrated optics : Integrated optics devices
(130.3990) Integrated optics : Micro-optical devices

ToC Category:
Optical Devices

History
Original Manuscript: October 18, 2013
Revised Manuscript: December 19, 2013
Manuscript Accepted: January 2, 2014
Published: February 14, 2014

Citation
Karan K. Mehta, Jason S. Orcutt, Jeffrey M. Shainline, Ofer Tehar-Zahav, Zvi Sternberg, Roy Meade, Miloš A. Popović, and Rajeev J. Ram, "Polycrystalline silicon ring resonator photodiodes in a bulk complementary metal-oxide-semiconductor process," Opt. Lett. 39, 1061-1064 (2014)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-39-4-1061

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