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Optics Letters

Optics Letters


  • Editor: Xi-Cheng Zhang
  • Vol. 39, Iss. 4 — Feb. 15, 2014
  • pp: 941–944

On-chip silicon optical phased array for two-dimensional beam steering

David Kwong, Amir Hosseini, John Covey, Yang Zhang, Xiaochuan Xu, Harish Subbaraman, and Ray T. Chen  »View Author Affiliations

Optics Letters, Vol. 39, Issue 4, pp. 941-944 (2014)

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A 16-element optical phased array integrated on chip is presented for achieving two-dimensional (2D) optical beam steering. The device is fabricated on the silicon-on-insulator platform with a 250 nm silicon device layer. Steering is achieved via a combination of wavelength tuning and thermo-optic phase shifting with a switching power of Pπ=20mW per channel. Using a silicon waveguide grating with a polycrystalline silicon overlay enables narrow far field beam widths while mitigating the precise etching needed for conventional shallow etch gratings. Using this system, 2D steering across a 20°×15° field of view is achieved with a sidelobe level better than 10 dB and with beam widths of 1.2°×0.5°.

© 2014 Optical Society of America

OCIS Codes
(130.3120) Integrated optics : Integrated optics devices
(250.5300) Optoelectronics : Photonic integrated circuits
(280.3640) Remote sensing and sensors : Lidar

ToC Category:
Remote Sensing and Sensors

Original Manuscript: August 14, 2013
Revised Manuscript: December 5, 2013
Manuscript Accepted: December 8, 2013
Published: February 10, 2014

David Kwong, Amir Hosseini, John Covey, Yang Zhang, Xiaochuan Xu, Harish Subbaraman, and Ray T. Chen, "On-chip silicon optical phased array for two-dimensional beam steering," Opt. Lett. 39, 941-944 (2014)

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