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Optics Letters

Optics Letters


  • Editor: Xi-Cheng Zhang
  • Vol. 39, Iss. 5 — Mar. 1, 2014
  • pp: 1185–1188

UV spectral filtering by surface structured multilayer mirrors

Qiushi Huang, Daniel Mathijs Paardekooper, Erwin Zoethout, V. V. Medvedev, Robbert van de Kruijs, Jeroen Bosgra, Eric Louis, and Fred Bijkerk  »View Author Affiliations

Optics Letters, Vol. 39, Issue 5, pp. 1185-1188 (2014)

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A surface structured extreme ultraviolet multilayer mirror was developed showing full band suppression of UV (λ=100400nm) and simultaneously a high reflectance of EUV light (λ=13.5nm). The surface structure consists of Si pyramids, which are substantially transparent for EUV but reflective for UV light. The reflected UV is filtered out by blazed diffraction, interference, and absorption. A first demonstration pyramid structure was fabricated on a multilayer by using a straightforward deposition technique. It shows an average suppression of 14 times over the whole UV range and an EUV reflectance of 56.2% at 13.5 nm. This robust scheme can be used as a spectral purity solution for all XUV sources that emit longer wavelength radiation as well.

© 2014 Optical Society of America

OCIS Codes
(050.1970) Diffraction and gratings : Diffractive optics
(340.7480) X-ray optics : X-rays, soft x-rays, extreme ultraviolet (EUV)
(310.6188) Thin films : Spectral properties

ToC Category:
X-ray Optics

Original Manuscript: November 27, 2013
Revised Manuscript: January 17, 2014
Manuscript Accepted: January 20, 2014
Published: February 21, 2014

Qiushi Huang, Daniel Mathijs Paardekooper, Erwin Zoethout, V. V. Medvedev, Robbert van de Kruijs, Jeroen Bosgra, Eric Louis, and Fred Bijkerk, "UV spectral filtering by surface structured multilayer mirrors," Opt. Lett. 39, 1185-1188 (2014)

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