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Optics Letters

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  • Editor: Xi-Cheng Zhang
  • Vol. 39, Iss. 6 — Mar. 15, 2014
  • pp: 1549–1552

Correction of large birefringent effect of windows for in situ ellipsometry measurements

Lianhua Jin and Eiichi Kondoh  »View Author Affiliations


Optics Letters, Vol. 39, Issue 6, pp. 1549-1552 (2014)
http://dx.doi.org/10.1364/OL.39.001549


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Abstract

To extract true optical properties of samples in a chamber with entrance and exit optical windows, oftentimes the windows were approximated as simple retarders where the retardation was small and premeasured under a given condition. The proposed method allows to cope with large birefringent effect of chamber windows thanks to its capability of extracting ellipsometric parameters (Δ, Ψ) of isotropic samples as well as measuring birefringent parameters (δ, θ) of each window separately and simultaneously. This method is, however, not valid for anisotropic samples. Ex situ results and extracted ellipsometric parameters results from in situ measurements of a silicon substrate and a SiO2 film thermally grown on the silicon substrate exhibited excellent agreement and provided significance of this method.

© 2014 Optical Society of America

OCIS Codes
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(260.1440) Physical optics : Birefringence
(260.5430) Physical optics : Polarization

ToC Category:
Physical Optics

History
Original Manuscript: January 14, 2014
Revised Manuscript: February 6, 2014
Manuscript Accepted: February 7, 2014
Published: March 12, 2014

Citation
Lianhua Jin and Eiichi Kondoh, "Correction of large birefringent effect of windows for in situ ellipsometry measurements," Opt. Lett. 39, 1549-1552 (2014)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-39-6-1549


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