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Optics Letters

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  • Editor: Xi-Cheng Zhang
  • Vol. 39, Iss. 7 — Apr. 1, 2014
  • pp: 1953–1956

Efficient multiline nanosecond pulse amplification in planar waveguide CO2 amplifier for extreme UV laser-produced plasma source

Krzysztof M. Nowak, Takeshi Ohta, Takashi Suganuma, Junichi Fujimoto, Hakaru Mizoguchi, Akira Sumitani, and Akira Endo  »View Author Affiliations


Optics Letters, Vol. 39, Issue 7, pp. 1953-1956 (2014)
http://dx.doi.org/10.1364/OL.39.001953


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Abstract

In this Letter, we report on recent experimental results of a short pulse amplification at 10.6 μm wavelength required to drive a tin laser-produced plasma (LPP) extreme ultraviolet (UV) source. We report for the first time, to our best knowledge, a highly efficient pulsed amplification in a multipass amplifier built on RF-discharge-excited, diffusion-cooled CO2, planar waveguide industrial CO2 laser. About 2 kW of output average power was obtained from about 100 W input average power in 15ns pulses at 100 kHz pulse repetition frequency. As much as 60% relative extraction efficiency, as compared to continuous-wave amplification in similar conditions, and 5.8% wall-plug efficiency was recorded and believed to be the highest reported so far. An improvement of extraction efficiency by 10% is reported when driving the amplifier with two lines of CO2 regular band in good agreement with expectations.

© 2014 Optical Society of America

OCIS Codes
(140.0140) Lasers and laser optics : Lasers and laser optics
(140.3470) Lasers and laser optics : Lasers, carbon dioxide
(140.4130) Lasers and laser optics : Molecular gas lasers
(140.3538) Lasers and laser optics : Lasers, pulsed
(140.5965) Lasers and laser optics : Semiconductor lasers, quantum cascade

ToC Category:
Lasers and Laser Optics

History
Original Manuscript: January 8, 2014
Revised Manuscript: February 24, 2014
Manuscript Accepted: February 25, 2014
Published: March 24, 2014

Citation
Krzysztof M. Nowak, Takeshi Ohta, Takashi Suganuma, Junichi Fujimoto, Hakaru Mizoguchi, Akira Sumitani, and Akira Endo, "Efficient multiline nanosecond pulse amplification in planar waveguide CO2 amplifier for extreme UV laser-produced plasma source," Opt. Lett. 39, 1953-1956 (2014)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-39-7-1953


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