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Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Editor: Xi-Cheng Zhang
  • Vol. 39, Iss. 7 — Apr. 1, 2014
  • pp: 2024–2027

Spatial frequency doubling with two-step technique

Sensen Li, Lujian Chen, Xiaopeng Dong, Xuechang Ren, Xiangsu Zhang, and Shou Liu  »View Author Affiliations


Optics Letters, Vol. 39, Issue 7, pp. 2024-2027 (2014)
http://dx.doi.org/10.1364/OL.39.002024


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Abstract

The phenomenon of spatial frequency doubling generated by a two-step technique with the collimated beam at normal incidence in the second exposure is presented. Theoretical analysis demonstrates that the phenomenon is induced by the Talbot effect in photoresist and the superposition of two exposures, and the minimum achievable period of the grating with double spatial frequency can be close to one half of the exposure wavelength in vacuum, divided by the refractive index of photoresist λ/2n. The two-step technique has the potential to be a simpler and more practical resolution-improving technique for the Talbot-effect-based approach of spatial frequency doubling.

© 2014 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(090.1970) Holography : Diffractive optics

ToC Category:
Holography

History
Original Manuscript: January 13, 2014
Revised Manuscript: February 24, 2014
Manuscript Accepted: February 25, 2014
Published: March 26, 2014

Citation
Sensen Li, Lujian Chen, Xiaopeng Dong, Xuechang Ren, Xiangsu Zhang, and Shou Liu, "Spatial frequency doubling with two-step technique," Opt. Lett. 39, 2024-2027 (2014)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-39-7-2024


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References

  1. P. Zimmerman, “Double patterning lithography: double the trouble or double the fun?” SPIE Newsroom, doi: 10.1117/2.1200906.1691 (2009).
  2. L. F. Johnson and K. A. Ingersoll, Appl. Phys. Lett. 38, 532 (1981). [CrossRef]
  3. B. Cui, Z. N. Yu, H. X. Ge, and S. Y. Chou, Appl. Phys. Lett. 90, 043118 (2007). [CrossRef]
  4. H. Lee and R. Verma, Opt. Express 19, 16518 (2011). [CrossRef]
  5. I. Z. Indutnyi, V. A. Dan’ko, V. I. Myn’ko, P. E. Shepeliavyi, and O. V. Bereznyova, J. Optoelectron. Adv. Mater. 13, 1467 (2011).
  6. H. H. Solak, C. David, J. Gobrecht, V. Golovkina, F. Cerrina, S. O. Kim, and P. F. Nealey, Microelectron. Eng. 56, 67 (2003).
  7. D. C. Flanders, A. M. Hawryluk, and H. I. Smith, J. Vac. Sci. Technol. 16, 1949 (1979). [CrossRef]
  8. H. H. Solak and Y. Ekinci, J. Vac. Sci. Technol. B 23, 2705 (2005). [CrossRef]
  9. S. S. Sarkar, H. H. Solak, M. Saidani, C. David, and J. F. van der Veen, Opt. Lett. 36, 1860 (2011). [CrossRef]
  10. H. H. Solak, C. Dais, and F. Clube, Opt. Express 19, 10686 (2011). [CrossRef]
  11. T. Sato, J. Vac. Sci. Technol. B 30, 06FG02 (2012). [CrossRef]
  12. S. S. Li, S. Liu, and X. S. Zhang, Proc. SPIE 5456, 374 (2004). [CrossRef]
  13. S. S. Li, S. Liu, X. S. Zhang, Y. Liu, and X. C. Ren, Proc. SPIE 5636, 597 (2005). [CrossRef]
  14. K. Patorski, Prog. Opt. 27, 1 (1989). [CrossRef]
  15. V. Arrizón and J. Ojeda-Castañeda, J. Opt. Soc. Am. A 9, 1801 (1992). [CrossRef]
  16. Y. Q. Lu, C. H. Zhou, S. Q. Wang, and B. Wang, J. Opt. Soc. Am. A 23, 2154 (2006). [CrossRef]
  17. Y. Fang, Q. F. Tan, M. Q. Zhang, and G. F. Jin, Opt. Commun. 285, 4161 (2012). [CrossRef]

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