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Optics Letters

Optics Letters


  • Editor: Xi-Cheng Zhang
  • Vol. 39, Iss. 8 — Apr. 15, 2014
  • pp: 2310–2313

Compact-sized high-modulation-efficiency silicon Mach–Zehnder modulator based on a vertically dipped depletion junction phase shifter for chip-level integration

Gyungock Kim, Jeong Woo Park, In Gyoo Kim, Sanghoon Kim, Ki-Seok Jang, Sun Ae Kim, Jin Hyuk Oh, Jiho Joo, and Sanggi Kim  »View Author Affiliations

Optics Letters, Vol. 39, Issue 8, pp. 2310-2313 (2014)

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We present small-sized depletion-type silicon Mach–Zehnder (MZ) modulator with a vertically dipped PN depletion junction (VDJ) phase shifter based on a CMOS compatible process. The fabricated device with a 100 μm long VDJ phase shifter shows a VπLπ of 0.6V·cm with a 3 dB bandwidth of 50GHz at 2V bias. The measured extinction ratios are 6 and 5.3 dB for 40 and 50Gb/s operation under 2.5Vpp differential drive, respectively. On-chip insertion loss is 3 dB for the maximum optical transmission. This includes the phase-shifter loss of 1.88dB/100μm, resulting mostly from the extra optical propagation loss through the polysilicon-plug structure for electrical contact, which can be readily minimized by utilizing finer-scaled lithography nodes. The experimental result indicates that a compact depletion-type MZ modulator based on the VDJ scheme can be a potential candidate for future chip-level integration.

© 2014 Optical Society of America

OCIS Codes
(130.0250) Integrated optics : Optoelectronics
(130.3120) Integrated optics : Integrated optics devices
(200.4650) Optics in computing : Optical interconnects
(250.5300) Optoelectronics : Photonic integrated circuits
(250.7360) Optoelectronics : Waveguide modulators

ToC Category:

Original Manuscript: January 31, 2014
Revised Manuscript: February 28, 2014
Manuscript Accepted: March 14, 2014
Published: April 8, 2014

Gyungock Kim, Jeong Woo Park, In Gyoo Kim, Sanghoon Kim, Ki-Seok Jang, Sun Ae Kim, Jin Hyuk Oh, Jiho Joo, and Sanggi Kim, "Compact-sized high-modulation-efficiency silicon Mach–Zehnder modulator based on a vertically dipped depletion junction phase shifter for chip-level integration," Opt. Lett. 39, 2310-2313 (2014)

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