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Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Editor: Xi-Cheng Zhang
  • Vol. 39, Iss. 8 — Apr. 15, 2014
  • pp: 2310–2313

Compact-sized high-modulation-efficiency silicon Mach–Zehnder modulator based on a vertically dipped depletion junction phase shifter for chip-level integration

Gyungock Kim, Jeong Woo Park, In Gyoo Kim, Sanghoon Kim, Ki-Seok Jang, Sun Ae Kim, Jin Hyuk Oh, Jiho Joo, and Sanggi Kim  »View Author Affiliations


Optics Letters, Vol. 39, Issue 8, pp. 2310-2313 (2014)
http://dx.doi.org/10.1364/OL.39.002310


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Abstract

We present small-sized depletion-type silicon Mach–Zehnder (MZ) modulator with a vertically dipped PN depletion junction (VDJ) phase shifter based on a CMOS compatible process. The fabricated device with a 100 μm long VDJ phase shifter shows a VπLπ of 0.6V·cm with a 3 dB bandwidth of 50GHz at 2V bias. The measured extinction ratios are 6 and 5.3 dB for 40 and 50Gb/s operation under 2.5Vpp differential drive, respectively. On-chip insertion loss is 3 dB for the maximum optical transmission. This includes the phase-shifter loss of 1.88dB/100μm, resulting mostly from the extra optical propagation loss through the polysilicon-plug structure for electrical contact, which can be readily minimized by utilizing finer-scaled lithography nodes. The experimental result indicates that a compact depletion-type MZ modulator based on the VDJ scheme can be a potential candidate for future chip-level integration.

© 2014 Optical Society of America

OCIS Codes
(130.0250) Integrated optics : Optoelectronics
(130.3120) Integrated optics : Integrated optics devices
(200.4650) Optics in computing : Optical interconnects
(250.5300) Optoelectronics : Photonic integrated circuits
(250.7360) Optoelectronics : Waveguide modulators

ToC Category:
Optoelectronics

History
Original Manuscript: January 31, 2014
Revised Manuscript: February 28, 2014
Manuscript Accepted: March 14, 2014
Published: April 8, 2014

Citation
Gyungock Kim, Jeong Woo Park, In Gyoo Kim, Sanghoon Kim, Ki-Seok Jang, Sun Ae Kim, Jin Hyuk Oh, Jiho Joo, and Sanggi Kim, "Compact-sized high-modulation-efficiency silicon Mach–Zehnder modulator based on a vertically dipped depletion junction phase shifter for chip-level integration," Opt. Lett. 39, 2310-2313 (2014)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-39-8-2310


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References

  1. M. Haurylau, G. Chen, H. Chen, J. Zhang, N. A. Nelson, D. H. Albonesi, E. G. Friedman, and P. M. Fauchet, IEEE J. Sel. Top. Quantum Electron. 12, 1699 (2006). [CrossRef]
  2. C. Gunn, Micro. IEEE 26, 58 (2006).
  3. A. Shacham, K. Bergman, and L. P. Carloni, IEEE Trans. Comput. 57, 1246 (2008). [CrossRef]
  4. D. Miller, Proc. IEEE 97, 1166 (2009). [CrossRef]
  5. R. Soref and B. Bennett, IEEE J. Quantum Electron. 23, 123 (1987). [CrossRef]
  6. R. A. Soref, IEEE J. Sel. Top. Quantum Electron. 12, 1678 (2006). [CrossRef]
  7. M. Lipson, J. Lightwave Technol. 23, 4222 (2005). [CrossRef]
  8. L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, Proc. SPIE 6125, 612502 (2006). [CrossRef]
  9. A. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, and J. Cunningham, Proc. IEEE 97, 1337 (2009). [CrossRef]
  10. B. Jalali, M. Paniccia, and G. Reed, IEEE Microw. Mag. 7(3), 58 (2006). [CrossRef]
  11. L. Liao, A. Liu, D. Rubin, J. Basak, Y. Chetrit, H. Nguyen, R. Cohen, N. Izhaky, and M. Paniccia, Electron. Lett. 43, 1196 (2007). [CrossRef]
  12. A. Liu, L. Liao, D. Rubin, H. Nguyen, B. Ciftcioglu, Y. Chetrit, N. Izhaky, and M. Paniccia, Opt. Express 15, 660 (2007). [CrossRef]
  13. W. Green, M. Rooks, L. Sekaric, and Y. Vlasov, Opt. Express 15, 17107 (2007).
  14. T. Pinguet, B. Analui, E. Balmater, D. Guckenberger, M. Harrison, R. Koumans, D. Kucharski, Y. Liang, G. Masini, A. Mekis, S. Mirsaidi, A. Narasimha, M. Peterson, D. Rines, V. Sadagopan, S. Sahni, T. J. Sleboda, D. Song, Y. Wang, B. Welch, J. Witzens, J. Yao, S. Abdalla, S. Gloeckner, P. De Dobbelaere, and G. Capellini, in Proceedings of the 5th IEEE International Conference Group IV Photonics (IEEE, 2008), pp. 362–364.
  15. D. Marris-Morini, L. Vivien, J. M. Fédéli, E. Cassan, P. Lyan, and S. Laval, Opt. Express 16, 334 (2008). [CrossRef]
  16. J. Park, J. You, I. Kim, and G. Kim, Opt. Express 17, 15520 (2009). [CrossRef]
  17. G. Reed, G. Mashanovich, F. Gardes, and D. Thomson, Nat. Photonics 4, 518 (2010). [CrossRef]
  18. N. Feng, S. Liao, D. Feng, P. Dong, D. Zheng, H. Liang, R. Shafiiha, G. Li, J. Cunningham, A. Krishnamoorthy, and M. Asghari, Opt. Express 18, 7994 (2010). [CrossRef]
  19. M. Watts, W. Zortman, D. Trotter, R. Young, and A. Lentine, IEEE J. Sel. Top. Quantum Electron. 16, 159 (2010). [CrossRef]
  20. F. Y. Gardes, D. Thomson, N. Emerson, and G. Reed, Opt. Express 19, 11804 (2011). [CrossRef]
  21. G. Rasigade, M. Ziebell, D. Marris-Morini, J.-M. Fédéli, F. Milesi, P. Grosse, D. Bouville, E. Cassan, and L. Vivien, Opt. Express 19, 5827 (2011). [CrossRef]
  22. D. Thomson, F. Gardes, Y. Hu, G. Mashanovich, M. Fournier, P. Grosse, J. Fedeli, and G. T. Reed, Opt. Express 19, 11507 (2011). [CrossRef]
  23. X. Zheng, D. Patil, J. Lexau, F. Liu, G. Li, H. Thacker, Y. Luo, I. Shubin, J. Li, J. Yao, P. Dong, D. Feng, M. Asghari, T. Pinguet, A. Mekis, P. Amberg, M. Dayringer, J. Gainsley, H. Moghadam, E. Alon, K. Raj, R. Ho, J. Cunningham, and A. Krishnamoorthy, Opt. Express 19, 5172 (2011). [CrossRef]
  24. G. Kim, J. Park, I. Kim, S. Kim, S. Kim, J. Lee, G. Park, J. Joo, K. Jang, J. Oh, S. Kim, J. Kim, J. Lee, J. Park, D. Kim, D. Jeong, M. Hwang, J. Kim, K. Park, H. Chi, H. Kim, D. Kim, and M. Cho, Opt. Express 19, 26936 (2011). [CrossRef]
  25. D. Thomson, F. Gardes, J. Fedeli, S. Zlatanovic, Y. Hu, B. Kuo, E. Myslivets, N. Alic, S. Radic, G. Mashanovich, and G. Reed, IEEE Photon. Technol. Lett. 24, 234 (2012). [CrossRef]
  26. J. Ding, H. Chen, L. Yang, L. Zhang, R. Ji, Y. Tian, W. Zhu, Y. Lu, P. Zhou, and R. Min, Opt. Express 20, 3209 (2012). [CrossRef]
  27. M. Ziebell, D. Marris-Morini, G. Rasigade, J. Fedeli, P. Crozat, E. Cassan, D. Bouville, and L. Vivien, Opt. Express 20, 10591 (2012). [CrossRef]
  28. T. Baehr-Jones, R. Ding, Y. Liu, A. Ayazi, T. Pinguet, N. Harris, M. Streshinsky, P. Lee, Y. Zhang, A. Lim, T. Liow, S. Teo, G. Lo, and M. Hochberg, Opt. Express 20, 12014 (2012). [CrossRef]
  29. H. Xu, X. Xiao, X. Li, Y. Hu, Z. Li, T. Chu, Y. Yu, and J. Yu, Opt. Express 20, 15093 (2012). [CrossRef]
  30. X. Xiao, H. Xu, X. Li, Z. Li, T. Chu, Y. Yu, and J. Yu, Opt. Express 20, 3209 (2013).
  31. I. Goykhman, B. Desiatov, S. Ben-Ezra, J. Shappir, and U. Levy, Opt. Express 21, 19518 (2013). [CrossRef]
  32. A. Novack, Y. Liu, R. Ding, M. Gould, T. Baehr-Jones, Q. Li, Y. Yang, Y. Ma, Y. Zhang, K. Padmaraju, K. Bergmen, A. E.-J. Lim, G.-Q. Lo, and M. Hochberg, in IEEE 10th International Conference on Group IV Photonics (IEEE, 2013), pp. 7–8.

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