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Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Vol. 6, Iss. 12 — Dec. 1, 1981
  • pp: 613–615

Fabrication of micro lenses using electron-beam lithography

T. Fujita, H. Nishihara, and J. Koyama  »View Author Affiliations


Optics Letters, Vol. 6, Issue 12, pp. 613-615 (1981)
http://dx.doi.org/10.1364/OL.6.000613


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Abstract

Micro lenses are basic components of micro optics. We have proposed a new fabrication technique for micro lenses that uses electron-beam lithography and have developed an electron-beam lithography system that is specially designed for this purpose. To demonstrate the feasibility of this technique, ordinary-type Fresnel (zone-plate) lenses and a special-type lens for converting an incident Gaussian intensity distribution into a uniform one were designed and fabricated. It was found that these Fresnel (zone-plate) lenses have near-diffraction-limited performance. The fabrication technique and experimental results are discussed.

© 1981 Optical Society of America

History
Original Manuscript: July 29, 1981
Published: December 1, 1981

Citation
T. Fujita, H. Nishihara, and J. Koyama, "Fabrication of micro lenses using electron-beam lithography," Opt. Lett. 6, 613-615 (1981)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-6-12-613

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