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Optics Letters

Optics Letters


  • Vol. 6, Iss. 12 — Dec. 1, 1981
  • pp: 613–615

Fabrication of micro lenses using electron-beam lithography

T. Fujita, H. Nishihara, and J. Koyama  »View Author Affiliations

Optics Letters, Vol. 6, Issue 12, pp. 613-615 (1981)

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Micro lenses are basic components of micro optics. We have proposed a new fabrication technique for micro lenses that uses electron-beam lithography and have developed an electron-beam lithography system that is specially designed for this purpose. To demonstrate the feasibility of this technique, ordinary-type Fresnel (zone-plate) lenses and a special-type lens for converting an incident Gaussian intensity distribution into a uniform one were designed and fabricated. It was found that these Fresnel (zone-plate) lenses have near-diffraction-limited performance. The fabrication technique and experimental results are discussed.

© 1981 Optical Society of America

Original Manuscript: July 29, 1981
Published: December 1, 1981

T. Fujita, H. Nishihara, and J. Koyama, "Fabrication of micro lenses using electron-beam lithography," Opt. Lett. 6, 613-615 (1981)

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  1. H. Nishihara, S. Inohara, T. Suhara, J. Koyama, “Holocoupler; a novel coupler for optical circuits,” IEEE J. Quantum Electron. QE-11, 794–796 (1975). [CrossRef]
  2. T. Fujita, H. Nishihara, J. Koyama, “Micro Fresnel lenses fabricated by electron-beam lithography,” Trans. Inst. Elect. Commun. Eng. Jpn. C (to be published, 1981).
  3. Y. Handa, T. Suhara, H. Nishihara, J. Koyama, “Microgratings for high-efficiency guided-beam deflection fabricated by electron-beam direct-writing techniques,” Appl. Opt. 19, 2842–2947 (1980). [CrossRef] [PubMed]
  4. R. Magnusson, T. K. Gaylord, “Diffraction efficiency of thin phase gratings with arbitary grating shape,” J. Opt. Soc. Am. 68, 806–809 (1978). [CrossRef]

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