Micro lenses are basic components of micro optics. We have proposed a new fabrication technique for micro lenses that uses electron-beam lithography and have developed an electron-beam lithography system that is specially designed for this purpose. To demonstrate the feasibility of this technique, ordinary-type Fresnel (zone-plate) lenses and a special-type lens for converting an incident Gaussian intensity distribution into a uniform one were designed and fabricated. It was found that these Fresnel (zone-plate) lenses have near-diffraction-limited performance. The fabrication technique and experimental results are discussed.
© 1981 Optical Society of America
T. Fujita, H. Nishihara, and J. Koyama, "Fabrication of micro lenses using electron-beam lithography," Opt. Lett. 6, 613-615 (1981)