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Measuring microvibrations by heterodyne speckle interferometry

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Abstract

In-plane as well as out-of-plane displacements and vibrations of objects with diffusely scattering surfaces are measured in real time. Microvibrations with amplitudes down to 1 nm and frequencies up to 5 MHz were analyzed at a spatial resolution of 35 μm.

© 1981 Optical Society of America

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